scholarly journals Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

2006 ◽  
Vol 89 (16) ◽  
pp. 161501 ◽  
Author(s):  
S. V. Singh ◽  
P. Kempkes ◽  
H. Soltwisch
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Transition Region ◽  
Electron Energy ◽  
Electron Energy Distribution Function ◽  
Energy Distribution Function ◽  
Mode Transition ◽  
Reference Cell ◽  
Inductively Coupled ◽  
Gaseous Electronics Conference
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