Lorentz force effect on electron energy distribution in low pressure inductively coupled plasmas

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961052 ◽

2002 ◽

Author(s):

V.I. Kolobov ◽

V.A. Godyak

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Lorentz Force ◽

Low Pressure ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Force Effect ◽

Inductively Coupled ◽

Coupled Plasmas

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Lorentz force effects on the electron energy distribution in inductively coupled plasmas

Physical Review E ◽

10.1103/physreve.64.026406 ◽

2001 ◽

Vol 64 (2) ◽

Cited By ~ 34

Author(s):

V. A. Godyak ◽

B. M. Alexandrovich ◽

V. I. Kolobov

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Lorentz Force ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Journal of Applied Physics ◽

10.1063/1.1452772 ◽

2002 ◽

Vol 91 (6) ◽

pp. 3539-3546 ◽

Cited By ~ 55

Author(s):

Mark W. Kiehlbauch ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Electron energy distribution modification by RF bias in Ar/SF6 inductively coupled plasmas

Applied Physics Letters ◽

10.1063/1.5110219 ◽

2019 ◽

Vol 115 (6) ◽

pp. 064102 ◽

Cited By ~ 3

Author(s):

Hyo-Chang Lee ◽

Chin-Wook Chung ◽

J. H. Kim ◽

D. J. Seong

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Response to “Comment on ‘Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas’” [Phys. Plasmas 22, 044701 (2015)]

Physics of Plasmas ◽

10.1063/1.4916651 ◽

2015 ◽

Vol 22 (4) ◽

pp. 044702

Author(s):

June Young Kim ◽

Young-Cheol Kim ◽

Yu-Sin Kim ◽

Chin-Wook Chung

Keyword(s):

Energy Loss ◽

Energy Distribution ◽

Total Energy ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Diagnostics of chlorine inductively coupled plasmas. Measurement of electron temperatures and electron energy distribution functions

Journal of Applied Physics ◽

10.1063/1.372072 ◽

2000 ◽

Vol 87 (4) ◽

pp. 1642-1649 ◽

Cited By ~ 89

Author(s):

M. V. Malyshev ◽

V. M. Donnelly

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas ◽

Energy Distribution Functions

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Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas

Physics of Plasmas ◽

10.1063/1.4905515 ◽

2015 ◽

Vol 22 (1) ◽

pp. 013501 ◽

Cited By ~ 3

Author(s):

June Young Kim ◽

Young-Cheol Kim ◽

Yu-Sin Kim ◽

Chin-Wook Chung

Keyword(s):

Energy Loss ◽

Energy Distribution ◽

Total Energy ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Comment on “Effect of the electron energy distribution on total energy loss with argon in inductively coupled plasmas” [Phys. Plasmas 22, 013501 (2015)]

Physics of Plasmas ◽

10.1063/1.4916650 ◽

2015 ◽

Vol 22 (4) ◽

pp. 044701 ◽

Cited By ~ 2

Author(s):

E. A. Bogdanov ◽

S. I. Eliseev ◽

A. A. Kudryavtsev

Keyword(s):

Energy Loss ◽

Energy Distribution ◽

Total Energy ◽

Electron Energy ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Electron energy distribution functions in low-pressure inductively coupled bounded plasmas

Physics of Plasmas ◽

10.1063/1.2339024 ◽

2006 ◽

Vol 13 (9) ◽

pp. 092104 ◽

Cited By ~ 45

Author(s):

Albert Meige ◽

Rod W. Boswell

Keyword(s):

Energy Distribution ◽

Electron Energy ◽

Low Pressure ◽

Distribution Functions ◽

Electron Energy Distribution ◽

Inductively Coupled ◽

Energy Distribution Functions

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A hybrid model for low pressure inductively coupled plasmas combining a fluid model for electrons with a plasma-potential-dependent energy distribution and a fluid-Monte Carlo model for ions

Plasma Sources Science and Technology ◽

10.1088/0963-0252/25/2/025007 ◽

2016 ◽

Vol 25 (2) ◽

pp. 025007 ◽

Cited By ~ 11

Author(s):

S Mouchtouris ◽

G Kokkoris

Keyword(s):

Monte Carlo ◽

Energy Distribution ◽

Hybrid Model ◽

Fluid Model ◽

Monte Carlo Model ◽

Low Pressure ◽

Plasma Potential ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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The nonlocal and local property of the electron energy distribution function in a low-pressure inductively coupled plasma

Physics of Plasmas ◽

10.1063/1.1287826 ◽

2000 ◽

Vol 7 (9) ◽

pp. 3826-3828 ◽

Cited By ~ 13

Author(s):

ChinWook Chung ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Local Property ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled

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