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Keyword(s):  
Proximity Effect ◽  
Model Based ◽  
Correction Scheme ◽  
Dose Modulation ◽  
Proximity Effect Correction

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Electron Beam ◽  
Proximity Effect ◽  
Direct Write ◽  
Model Based ◽  
Proximity Effect Correction

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Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
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Photonic Waveguides ◽  
Proximity Effect Correction

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Proximity Effect ◽  
Proximity Effect Correction
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