Application of the GHOST proximity effect correction scheme to round beam and shaped beam electron lithography systems

1985 ◽  
Vol 3 (1) ◽  
pp. 153 ◽  
Author(s):  
Geraint Owen
Keyword(s):  
Proximity Effect ◽  
Beam Electron ◽  
Shaped Beam ◽  
Correction Scheme ◽  
Proximity Effect Correction ◽  
Electron Lithography

Implementation of real-time proximity effect correction in a raster shaped beam tool

2000 ◽  
Vol 18 (6) ◽  
pp. 3138 ◽  
Author(s):  
V. Boegli ◽  
L. Johnson ◽  
H. Kao ◽  
L. Veneklasen ◽  
U. Hofmann ◽  
...  
Keyword(s):  
Real Time ◽  
Proximity Effect ◽  
Shaped Beam ◽  
Proximity Effect Correction

Fabrication of Si photonic waveguides by electron beam lithography using improved proximity effect correction

2020 ◽  
Vol 59 (12) ◽  
pp. 126502
Author(s):  
Moataz Eissa ◽  
Takuya Mitarai ◽  
Tomohiro Amemiya ◽  
Yasuyuki Miyamoto ◽  
Nobuhiko Nishiyama
Keyword(s):  
Electron Beam ◽  
Proximity Effect ◽  
Electron Beam Lithography ◽  
Photonic Waveguides ◽  
Proximity Effect Correction

Proximity effect correction for reticle fabrication

2000 ◽  
Author(s):  
Masao Sugiyama ◽  
Shinji Kubo ◽  
Koji Hiruta ◽  
Takayuki Iwamatsu ◽  
Tatsuya Fujisawa ◽  
...  
Keyword(s):  
Proximity Effect ◽  
Proximity Effect Correction
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