Fabrication of subwavelength surface structures combining self-assembled masking layer with plasma etching techniques

2003 ◽  
Vol 21 (6) ◽  
pp. 2496 ◽  
Author(s):  
E. Oesterschulze ◽  
G. Georgiev ◽  
M. Müller-Wiegand ◽  
A. Georgieva ◽  
K. Ludolph
Keyword(s):  
Plasma Etching ◽  
Surface Structures ◽  
Self Assembled

Fast scatterometric measurement of periodic surface structures in plasma-etching processes

Measurement ◽  
2021 ◽  
Vol 170 ◽  
pp. 108721
Author(s):  
Wolfgang Matthias Klesse ◽  
Andreas Rathsfeld ◽  
Claudine Groß ◽  
Enno Malguth ◽  
Oliver Skibitzki ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Surface Structures ◽  
Periodic Surface

Silicon Patterning Using Self-assembled PS-b -PAA Diblock Copolymer Masks for Black Silicon Fabrication via Plasma Etching

2012 ◽  
Vol 9 (10) ◽  
pp. 968-974 ◽  
Author(s):  
Xin Zhang ◽  
Andrei B. Sushkov ◽  
Christopher J. Metting ◽  
Sean Fackler ◽  
H. Dennis Drew ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Diblock Copolymer ◽  
Black Silicon ◽  
Self Assembled

Poly(2-vinylnaphthalene)-block- poly(acrylic acid) Block Copolymer: Self-Assembled Pattern Formation, Alignment, and Transfer into Silicon via Plasma Etching

2011 ◽  
Vol 212 (16) ◽  
pp. 1735-1741 ◽  
Author(s):  
Xin Zhang ◽  
Christopher J. Metting ◽  
Robert M. Briber ◽  
Florian Weilnboeck ◽  
Sang Hak Shin ◽  
...  
Keyword(s):  
Block Copolymer ◽  
Pattern Formation ◽  
Acrylic Acid ◽  
Plasma Etching ◽  
Self Assembled ◽  
Poly Acrylic Acid

Nanoscale self-assembled surface structures of silicon at femtosecond excitation

2007 ◽  
Vol 19 (3) ◽  
pp. 155-157
Author(s):  
M. El-Bandrawy ◽  
A. A. Bugayev
Keyword(s):  
Surface Structures ◽  
Self Assembled

Non-Close-Packed Crystals from Self-Assembled Polystyrene Spheres by Isotropic Plasma Etching: Adding Flexibility to Colloid Lithography

2009 ◽  
Vol 19 (20) ◽  
pp. 3279-3284 ◽  
Author(s):  
Alfred Plettl ◽  
Fabian Enderle ◽  
Marc Saitner ◽  
Achim Manzke ◽  
Christian Pfahler ◽  
...  
Keyword(s):  
Plasma Etching ◽  
Polystyrene Spheres ◽  
Isotropic Plasma ◽  
Self Assembled

Surface Structures of Amine-Bearing Siloxane Self-Assembled Monolayers: Influence of Conformation on Methylene Vibrational Frequencies

2014 ◽  
Vol 118 (29) ◽  
pp. 15804-15815
Author(s):  
Matthew D. King ◽  
Matthew T. Kihara ◽  
Geoffrey A. Lott ◽  
Michael W. Hill ◽  
Lawrence F. Scatena
Keyword(s):  
Vibrational Frequencies ◽  
Surface Structures ◽  
Self Assembled Monolayers ◽  
Assembled Monolayers ◽  
Self Assembled
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