Silicon Patterning Using Self-assembled PS-b
-PAA Diblock Copolymer Masks for Black Silicon Fabrication via Plasma Etching
2012 ◽
Vol 9
(10)
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pp. 968-974
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2016 ◽
Vol 84
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pp. 236-244
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Keyword(s):
Keyword(s):
2009 ◽
Vol 113
(7)
◽
pp. 1857-1868
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2011 ◽
Vol 212
(16)
◽
pp. 1735-1741
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Keyword(s):
2011 ◽
Vol 115
(10)
◽
pp. 4228-4234
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