isotropic plasma
Recently Published Documents

TOTAL DOCUMENTS

157
(FIVE YEARS 2)

H-INDEX

16
(FIVE YEARS 0)
Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

scholarly journals Isotropic plasma atomic layer etching of Al2O3 using a fluorine containing plasma and Al(CH3)3

2020 ◽  
Vol 117 (16) ◽  
pp. 162107
Author(s):  
Nicholas J. Chittock ◽  
Martijn F. J. Vos ◽  
Tahsin Faraz ◽  
Wilhelmus M. M. (Erwin) Kessels ◽  
Harm C. M. Knoops ◽  
...  
Keyword(s):  
Atomic Layer ◽  
Isotropic Plasma ◽  
Atomic Layer Etching

Isotropic plasma free Si trim for FinFET to GAA device architectures (Conference Presentation)

2020 ◽  
Author(s):  
Subhadeep Kal ◽  
Yusuke Oniki ◽  
Cheryl Alix ◽  
Karine Kenis ◽  
Efrain Altamirano-Sánchez ◽  
...  
Keyword(s):  
Isotropic Plasma

scholarly journals Characteristics of electromagnetic wave transmission and reflection from isotropic plasma coated circular nihility cylinder

AIP Advances ◽  
2019 ◽  
Vol 9 (4) ◽  
pp. 045320
Author(s):  
M. H. Shehzad ◽  
M. Bashir ◽  
M. Z. Yaqoob ◽  
A. Ghaffar ◽  
Majeed Alkanhal ◽  
...  
Keyword(s):  
Electromagnetic Wave ◽  
Wave Transmission ◽  
Isotropic Plasma ◽  
Transmission And Reflection

Interaction of directive electromagnetic radiation with isotropic plasma-coated PEMC cylinder

2018 ◽  
Vol 29 (4) ◽  
pp. 706-721
Author(s):  
A. Ghaffar ◽  
M. M. Hussan ◽  
Majeed A. S. Alkanhal ◽  
Yasin Khan
Keyword(s):  
Electromagnetic Radiation ◽  
Isotropic Plasma
Load More ...
Sign in / Sign up

Export Citation Format

Share Document