Investigation on dual gate oxide charging damage in 0.13μm copper damascene technology

2003 ◽  
Author(s):  
W.Y. Teo ◽  
Y.T. Hou ◽  
M.F. Li ◽  
P. Chen ◽  
L.H. Ko ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Dual Gate

Planar dual gate oxide LDMOS structures in 180nm power management technology

2012 ◽  
Author(s):  
Santosh Sharma ◽  
Theodore Letavic ◽  
Yun Shi ◽  
Alain Loiseau ◽  
John-Ellis Monaghan ◽  
...  
Keyword(s):  
Power Management ◽  
Gate Oxide ◽  
Management Technology ◽  
Dual Gate

Highly Reliable Dual Gate Oxide Fabrication by Reducing Wet Etching Time and Re-Oxidation for Sub-Quarter Micron CMOS Devices

1999 ◽  
Author(s):  
Ihl Hyun Cho ◽  
Key Min Lee ◽  
Hong Goo Choi ◽  
Sang Hyuk Park ◽  
Seok-Woo Lee ◽  
...  
Keyword(s):  
Gate Oxide ◽  
Wet Etching ◽  
Etching Time ◽  
Dual Gate

Dual Gate Oxide Process Integration for High Performance Embedded Memory Products

1998 ◽  
Author(s):  
Hideo Oi ◽  
Yasuhito Shiho ◽  
Peter Chen ◽  
Navakant Bhat
Keyword(s):  
High Performance ◽  
Process Integration ◽  
Gate Oxide ◽  
Embedded Memory ◽  
Dual Gate

Wet Oxide Etching of Dual Gate Oxide for 0.13μm Technologies and Beyond: Interaction with Photoresist and Equipment

2003 ◽  
Vol 92 ◽  
pp. 85-88 ◽  
Author(s):  
Simon Y.M. Chooi ◽  
Sang-Yee Loong ◽  
Christopher Lim ◽  
Zainab Ismail ◽  
Tjin-Tjin Tjoa
Keyword(s):  
Gate Oxide ◽  
Oxide Etching ◽  
Dual Gate

SC1 Cleaning Effect on Electrical Characteristics of 256 Mbit Mobile DRAM with Dual Gate Oxide

2004 ◽  
Vol 151 (10) ◽  
pp. G683 ◽  
Author(s):  
Chihoon Lee ◽  
Namhyuk Jo ◽  
Chanseong Hwang ◽  
Hyeong Joon Kim ◽  
Wonshik Lee
Keyword(s):  
Gate Oxide ◽  
Electrical Characteristics ◽  
Dual Gate
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