Charge trapping and degradation of HfO/sub 2//SiO/sub 2/ MOS gate stacks observed with enhanced CAFM

2006 ◽  
Vol 27 (3) ◽  
pp. 157-159 ◽  
Author(s):  
L. Aguilera ◽  
M. Porti ◽  
M. Nafria ◽  
X. Aymerich
Keyword(s):  
Charge Trapping ◽  
Gate Stacks ◽  
Mos Gate

scholarly journals Extensive assessment of the charge-trapping kinetics in InGaAs MOS gate-stacks for the demonstration of improved BTI reliability

2020 ◽  
Vol 115 ◽  
pp. 113996
Author(s):  
Vamsi Putcha ◽  
Jacopo Franco ◽  
Abhitosh Vais ◽  
Ben Kaczer ◽  
Qi Xie ◽  
...  
Keyword(s):  
Charge Trapping ◽  
Gate Stacks ◽  
Mos Gate

W/HfO2 gate stacks with Tinv～1.2nm and low charge trapping

2003 ◽  
Author(s):  
A. Callegari ◽  
P. Jamison ◽  
B.H. Lee ◽  
D. Neumayer ◽  
V. Narayanan ◽  
...  
Keyword(s):  
Charge Trapping ◽  
Gate Stacks ◽  
Low Charge

Charge trapping in HfO2 and HfSiO4 MOS gate dielectrics

2006 ◽  
Vol 50 (9-10) ◽  
pp. 1670-1672 ◽  
Author(s):  
Kyuhwan Chang ◽  
Feng-Ming Chang ◽  
Jerzy Ruzyllo
Keyword(s):  
Gate Dielectrics ◽  
Charge Trapping ◽  
Mos Gate

A New Quality Metric for III–V/High-k MOS Gate Stacks Based on the Frequency Dispersion of Accumulation Capacitance and the CET

2017 ◽  
Vol 38 (3) ◽  
pp. 318-321 ◽  
Author(s):  
Abhitosh Vais ◽  
Jacopo Franco ◽  
Koen Martens ◽  
Dennis Lin ◽  
Sonja Sioncke ◽  
...  
Keyword(s):  
Frequency Dispersion ◽  
Gate Stacks ◽  
Quality Metric ◽  
High K ◽  
Mos Gate

scholarly journals Charge trapping in ultrathin hafnium silicate/metal gate stacks

2005 ◽  
Vol 26 (12) ◽  
pp. 913-915 ◽  
Author(s):  
P. Srinivasan ◽  
N.A. Chowdhury ◽  
D. Misra
Keyword(s):  
Charge Trapping ◽  
Gate Stacks ◽  
Metal Gate ◽  
Hafnium Silicate

Physical and electrical characterizations of AlGaN/GaN MOS gate stacks with AlGaN surface oxidation treatment

2018 ◽  
Vol 57 (6S3) ◽  
pp. 06KA07
Author(s):  
Takahiro Yamada ◽  
Kenta Watanabe ◽  
Mikito Nozaki ◽  
Hong-An Shih ◽  
Satoshi Nakazawa ◽  
...  
Keyword(s):  
Surface Oxidation ◽  
Gate Stacks ◽  
Oxidation Treatment ◽  
Electrical Characterizations ◽  
Mos Gate
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