Defects in High-k Gate Dielectric Stacks - NATO Science Series II: Mathematics, Physics and Chemistry
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9781402043659, 9781402043673
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STRUCTURE, COMPOSITION AND ORDER AT INTERFACES OF CRYSTALLINE OXIDES AND OTHER HIGH-K MATERIALS ON SILICON

2006 ◽  
pp. 349-360 ◽  
Author(s):  
TORGNY GUSTAFSSON ◽  
ERIC GARFUNKEL ◽  
LYUDMILA GONCHAROVA ◽  
DMITRI STARODUB ◽  
ROBIN BARNES ◽  
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High K ◽  
High K Materials ◽  
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TRANSIENT CHARGING EFFECTS AND ITS IMPLICATIONS TO THE RELIABILITY OF HIGH-K DIELECTRICS

2006 ◽  
pp. 161-173 ◽  
Author(s):  
BYOUNG HUN LEE ◽  
RINO CHOI ◽  
RUSTY HARRIS ◽  
S.A. KRISHAN ◽  
CHADWIN D. YOUNG ◽  
...  
Keyword(s):  
High K
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