Some solutions for writing current reduction and high density application of phase change memory
2011 ◽
Vol 50
(9S1)
◽
pp. 09MD04
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2012 ◽
Vol 12
(10)
◽
pp. 7939-7943
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Keyword(s):
Dry Etching of Nanosized Ge1Sb2Te4 Patterns Using TiN Hard Mask for High Density Phase-Change Memory
2009 ◽
Vol 9
(2)
◽
pp. 1526-1529
◽
Keyword(s):
Keyword(s):
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2020 ◽
Vol 67
(10)
◽
pp. 4228-4233
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