Modeling oxide thickness dependence of charging damage by plasma processing

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pp. 509-511 ◽  
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C. Hu
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Tomohiro Kubota ◽  
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1995 ◽  
Vol 331-333 ◽  
pp. 1367-1371 ◽  
Author(s):  
C.W. van Hasselt ◽  
E. Mateman ◽  
M.A.C. Devillers ◽  
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...  

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pp. 93-98 ◽  
Author(s):  
Y. Hamada ◽  
S. Otsuka ◽  
T. Shimizu ◽  
S. Shingubara

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Vol 39 (6-7) ◽  
pp. 791-795 ◽  
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