Power absorption corresponding to ion losses in parallel-plate RF discharges
1991 ◽
Vol 19
(2)
◽
pp. 214-218
◽
1997 ◽
Vol 36
(Part 1, No. 8)
◽
pp. 5286-5289
1991 ◽
Vol 19
(4)
◽
pp. 660-676
◽
1971 ◽
Vol 29
◽
pp. 76-77
2020 ◽
Vol 14
(3)
◽
pp. 7082-7093
Keyword(s):
2019 ◽
Vol 139
(12)
◽
pp. 699-700