Electrical characteristics of parallel-plate RF discharges in argon
1991 ◽
Vol 19
(4)
◽
pp. 660-676
◽
1997 ◽
Vol 36
(Part 1, No. 8)
◽
pp. 5286-5289
1991 ◽
Vol 19
(2)
◽
pp. 214-218
◽
1971 ◽
Vol 29
◽
pp. 76-77
1992 ◽
Vol 50
(2)
◽
pp. 1338-1339
1992 ◽
Vol 50
(2)
◽
pp. 1422-1423