scholarly journals Generation and Suppression of DC Self-Bias Voltage in Parallel-Plate RF Discharges.

Shinku ◽  
1993 ◽  
Vol 36 (3) ◽  
pp. 295-298
Author(s):  
Itsuo ISHIKAWA ◽  
Kazuya NAGASEKI ◽  
Eiichi NISHIMURA ◽  
Yukinori SAITO ◽  
Shinji SUGANOMATA
Keyword(s):  
Bias Voltage ◽  
Parallel Plate ◽  
Rf Discharges ◽  
Self Bias

Estimation of Ion Impact Energies and Electrode Self-Bias Voltage in Capacitive RF Discharges

1987 ◽  
Vol 98 ◽  
Author(s):  
S. E. Savas
Keyword(s):  
Bias Voltage ◽  
Capacitively Coupled ◽  
Ion Flow ◽  
Rf Discharges ◽  
Self Bias ◽  
Ion Energies ◽  
Bias Ratio ◽  
Ionization Model ◽  
Ion Impact ◽  
Impact Energies

ABSTRACTThe dependences of the electrode self-bias voltage and the ratio of ion energies on electrode area ratio are calculated for a model of capacitively coupled rf discharges. It is assumed that concentric spherical elecrodes with fluid-like radial ion flow adequately models the ion motion, that sheath impedances are dominant, and that ionization processes in the glow are due to ohmically heated electrons. Results show that the ratio of ion energies impacting the smaller electrode to those on the larger depends on the ratio of electrode areas in a more complex manner than a power law.The reason for this is that sheath impedances are more resistive or capacitive at different times in the rf cycle. The self-bias ratio is found to depend relatively little on the ionization model or the pressure but differs substantially from the “power law” result. The agreement of measurements with the model is fairly good.

scholarly journals Redefinition of the self-bias voltage in a dielectrically shielded thin sheath RF discharge

2018 ◽  
Vol 123 (19) ◽  
pp. 193301 ◽  
Author(s):  
Teck Seng Ho ◽  
Christine Charles ◽  
Rod Boswell
Keyword(s):  
Bias Voltage ◽  
The Self ◽  
Rf Discharge ◽  
Self Bias

Characteristics of Parallel-Plate RF Discharges in C4F8Gas and C4F8/O2Mixtures

1997 ◽  
Vol 36 (Part 1, No. 8) ◽  
pp. 5286-5289
Author(s):  
Kenji Aoyagi ◽  
Itsuo Ishikawa ◽  
Kazuya Nagaseki ◽  
Yuuji Hirose ◽  
Yukinori Saito ◽  
...  
Keyword(s):  
Parallel Plate ◽  
Rf Discharges
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