Effects of structured electrodes on electron power absorption and plasma uniformity in capacitive RF discharges
2021 ◽
Vol 39
(6)
◽
pp. 063004
1991 ◽
Vol 19
(2)
◽
pp. 214-218
◽
2020 ◽
Vol 14
(3)
◽
pp. 7082-7093
Keyword(s):
2019 ◽
Vol 139
(12)
◽
pp. 699-700
2014 ◽
Vol 10
(5)
◽
pp. 676-683
◽
1983 ◽
Vol EMC-25
(4)
◽
pp. 448-453
◽
Keyword(s):
Keyword(s):