Noninvasive plasma diagnostics in a parallel-plate reactor for RF discharges

1996 ◽  
Vol 16 (4) ◽  
pp. 487-498
Author(s):  
J. Schwarz
1981 ◽  
Vol 23 (3) ◽  
pp. 657-661 ◽  
Author(s):  
Jun-Ichi Koizumi ◽  
Shuichi Aiba

1997 ◽  
Vol 36 (Part 1, No. 8) ◽  
pp. 5286-5289
Author(s):  
Kenji Aoyagi ◽  
Itsuo Ishikawa ◽  
Kazuya Nagaseki ◽  
Yuuji Hirose ◽  
Yukinori Saito ◽  
...  
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