The effects of fluorine on parametrics and reliability in a 0.18-μm 3.5/6.8 nm dual gate oxide CMOS technology

2001 ◽  
Vol 48 (7) ◽  
pp. 1346-1353 ◽  
Author(s):  
T.B. Hook ◽  
E. Adler ◽  
F. Guarin ◽  
J. Lukaitis ◽  
N. Rovedo ◽  
...  
Keyword(s):  
2001 ◽  
Author(s):  
S. Maeda ◽  
K. Shiga ◽  
H. Naruoka ◽  
N. Hattori ◽  
T. Iwamatsu ◽  
...  

2003 ◽  
Vol 42 (Part 1, No. 4B) ◽  
pp. 1892-1896 ◽  
Author(s):  
Chihoon Lee ◽  
Donggun Park ◽  
Namhyuk Jo ◽  
Chanseong Hwang ◽  
Hyeong Joon Kim ◽  
...  

2005 ◽  
Vol 44 (4B) ◽  
pp. 2125-2131
Author(s):  
Kwang-Seng See ◽  
Wai-Shing Lau ◽  
Suey-Li Toh ◽  
Hong Liao ◽  
Jae Gon Lee ◽  
...  

2004 ◽  
Author(s):  
Kwang-Seng See ◽  
Wai-Shing Lau ◽  
Hong Liao ◽  
Jae Gon Lee ◽  
Elgin Kiok-Boone Quek ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document