scholarly journals Quality factor tuning of micromechanical resonators via electrical dissipation

2020 ◽  
Vol 116 (2) ◽  
pp. 023506 ◽  
Author(s):  
Nicholas E. Bousse ◽  
James M. L. Miller ◽  
Hyun-Keun Kwon ◽  
Gabrielle D. Vukasin ◽  
Thomas W. Kenny
Keyword(s):  
Quality Factor ◽  
Micromechanical Resonators

Improving the quality factor of polycrystalline Si thin-film micromechanical resonators by metal-induced lateral crystallization using biomineralized Ni nanoparticles

2013 ◽  
Vol 103 (22) ◽  
pp. 223103 ◽  
Author(s):  
Shinya Kumagai ◽  
Takashi Tomikawa ◽  
Shohei Ogawa ◽  
Ichiro Yamashita ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Thin Film ◽  
Quality Factor ◽  
Ni Nanoparticles ◽  
Micromechanical Resonators ◽  
Lateral Crystallization ◽  
Si Thin Film

Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

2013 ◽  
Vol 102 (7) ◽  
pp. 071901 ◽  
Author(s):  
Hadi Najar ◽  
Amir Heidari ◽  
Mei-Lin Chan ◽  
Hseuh-An Yang ◽  
Liwei Lin ◽  
...  
Keyword(s):  
Quality Factor ◽  
Thermoelastic Damping ◽  
Micromechanical Resonators

Limits of quality factor in bulk-mode micromechanical resonators

2008 ◽  
Author(s):  
S. A. Chandorkar ◽  
M. Agarwal ◽  
R. Melamud ◽  
R. N. Candler ◽  
K. E. Goodson ◽  
...  
Keyword(s):  
Quality Factor ◽  
Micromechanical Resonators ◽  
Bulk Mode

Investigation of MEMS Resonator Characteristics for Long-Term and Wide Temperature Variation Operation

2004 ◽  
Author(s):  
Bongsang Kim ◽  
Rob N. Candler ◽  
Matthew Hopcroft ◽  
Manu Agarwal ◽  
Woo-Tae Park ◽  
...  
Keyword(s):  
Resonant Frequency ◽  
Quality Factor ◽  
Single Crystal Silicon ◽  
Temperature Cycling ◽  
Separate Experiment ◽  
Total Change ◽  
Crystal Silicon ◽  
Micromechanical Resonators ◽  
Mems Resonator

Two types of single-crystal silicon micromechanical resonators having resonant frequencies at 150 kHz and 130 kHz were tested under harsh environment to investigate stability. To observe long-term stability, the main characteristics, such as resonant frequency and quality factor were measured over 2,500 hrs continuously while maintaining constant environmental temperature at 25°C±0.1 °C. A separate experiment was also initiated to show stability during temperature cycling from −50°C to 80 °C. In both experiments, the total change in resonant frequency were less than 10 ppm and quality factor less than 10%, which demonstrates the stability of encapsulated micromechanical resonators upon exposure to harsh environments.

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