Effect of etch holes on quality factor of bulk-mode micromechanical resonators

2008 ◽  
Vol 44 (15) ◽  
pp. 938 ◽  
Author(s):  
L. Shao ◽  
M. Palaniapan
Keyword(s):  
Quality Factor ◽  
Micromechanical Resonators ◽  
Bulk Mode

Limits of quality factor in bulk-mode micromechanical resonators

2008 ◽  
Author(s):  
S. A. Chandorkar ◽  
M. Agarwal ◽  
R. Melamud ◽  
R. N. Candler ◽  
K. E. Goodson ◽  
...  
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Quality Factor ◽  
Micromechanical Resonators ◽  
Bulk Mode

Improving the quality factor of polycrystalline Si thin-film micromechanical resonators by metal-induced lateral crystallization using biomineralized Ni nanoparticles

2013 ◽  
Vol 103 (22) ◽  
pp. 223103 ◽  
Author(s):  
Shinya Kumagai ◽  
Takashi Tomikawa ◽  
Shohei Ogawa ◽  
Ichiro Yamashita ◽  
Yukiharu Uraoka ◽  
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Keyword(s):  
Thin Film ◽  
Quality Factor ◽  
Ni Nanoparticles ◽  
Micromechanical Resonators ◽  
Lateral Crystallization ◽  
Si Thin Film

scholarly journals Quality factor tuning of micromechanical resonators via electrical dissipation

2020 ◽  
Vol 116 (2) ◽  
pp. 023506 ◽  
Author(s):  
Nicholas E. Bousse ◽  
James M. L. Miller ◽  
Hyun-Keun Kwon ◽  
Gabrielle D. Vukasin ◽  
Thomas W. Kenny
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Quality Factor ◽  
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Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

2013 ◽  
Vol 102 (7) ◽  
pp. 071901 ◽  
Author(s):  
Hadi Najar ◽  
Amir Heidari ◽  
Mei-Lin Chan ◽  
Hseuh-An Yang ◽  
Liwei Lin ◽  
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Quality Factor ◽  
Thermoelastic Damping ◽  
Micromechanical Resonators

Effect of air damping on quality factor of bulk mode microresonators

2013 ◽  
Vol 103 ◽  
pp. 86-91 ◽  
Author(s):  
G.Q. Wu ◽  
D.H. Xu ◽  
B. Xiong ◽  
Y.L. Wang
Keyword(s):  
Quality Factor ◽  
Air Damping ◽  
Bulk Mode
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