Microcrystalline diamond micromechanical resonators with quality factor limited by thermoelastic damping

2013 ◽  
Vol 102 (7) ◽  
pp. 071901 ◽  
Author(s):  
Hadi Najar ◽  
Amir Heidari ◽  
Mei-Lin Chan ◽  
Hseuh-An Yang ◽  
Liwei Lin ◽  
...  
Keyword(s):  
Quality Factor ◽  
Thermoelastic Damping ◽  
Micromechanical Resonators

High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping

2014 ◽  
Vol 104 (15) ◽  
pp. 151903 ◽  
Author(s):  
Hadi Najar ◽  
Mei-Lin Chan ◽  
Hsueh-An Yang ◽  
Liwei Lin ◽  
David G. Cahill ◽  
...  
Keyword(s):  
Quality Factor ◽  
Nanocrystalline Diamond ◽  
High Quality Factor ◽  
Thermoelastic Damping ◽  
High Quality ◽  
Micromechanical Resonators

An Entropy Based Analytical Model for Thermoelastic Damping in Micromechanical Resonators

2012 ◽  
Vol 159 ◽  
pp. 46-50 ◽  
Author(s):  
Yong Peng Tai ◽  
Pu Li ◽  
Wan Li Zuo
Keyword(s):  
Quality Factor ◽  
Analytical Model ◽  
Entropy Generation ◽  
Accurate Estimation ◽  
Thermoelastic Damping ◽  
Small Vibration ◽  
Micromechanical Resonators ◽  
Thin Beam ◽  
Parameter Measuring ◽  
Linear Thermoelasticity

In this paper, we present an analytical model for thermoelastic damping (TED) in micromechanical resonators, which is based on entropy generation, a thermodynamic parameter measuring the irreversibility in heat conduction. The temperature field of thin beam with small vibration is obtained by solving governing equations of linear thermoelasticity. The analytical solution is derived from the entropy generation equation. This method of entropy generation can provide an accurate estimation of the quality factor in flexural resonators. The results are compared with Zener’s approximation and LR (Lifshitz and Roukes) method. It is shown that the analytical model described in this paper is valid to estimate the quality factor due to thermoelastic damping.

Thermoelastic damping in GaAs micromechanical resonators

2008 ◽  
Vol 5 (9) ◽  
pp. 2920-2922 ◽  
Author(s):  
Hajime Okamoto ◽  
Daisuke Ito ◽  
Koji Onomitsu ◽  
Hiroshi Yamaguchi
Keyword(s):  
Thermoelastic Damping ◽  
Micromechanical Resonators

scholarly journals A Study on the Trimming Effects on the Quality Factor of Micro-Shell Resonators Vibrating in Wineglass Modes

Micromachines ◽  
2019 ◽  
Vol 10 (10) ◽  
pp. 695
Author(s):  
Lu ◽  
Xi ◽  
Xiao ◽  
Shi ◽  
Zhuo ◽  
...  
Keyword(s):  
Finite Element Method ◽  
Quality Factor ◽  
Second Harmonic ◽  
Great Influence ◽  
Fem Simulation ◽  
Q Factor ◽  
Thermoelastic Damping ◽  
Frequency Trimming ◽  
Quality Factor Q ◽  
Anchor Loss

Frequency trimming based on mass and stiffness modification is an important post-fabrication process for micro-shell resonators (MSRs). However, the trimming effects on the quality factor are seldom studied, although they may have great influence on the performance of the resonator. This paper presents a study on the quality factor (Q-factor) variation of trimmed micro-shell resonators (MSR). Thermoelastic damping (QTED) and anchor loss (Qanchor) are found to be the dominant energy loss mechanisms resulting in the reduction of the overall Q-factor, according to finite element method (FEM). The effects of different trimming methods on QTED and Qanchor are studied here, respectively. It is found that trimming grooves ablated in the rim of the resonator can cause a ~1–10% reduction of QTED, and the length of trimming groove is positively related to the reduction of QTED. The reduction of QTED caused by the mass adding process is mainly related to the thermal expansion coefficient and density of the additive and contact area between the resonator and additive masses. Besides, the first and second harmonic errors caused by asymmetrical trimming can cause a 10–90% reduction of Qanchor. Finally, trimming experiments were conducted on different resonators and the results were compared with FEM simulation. The work presented in this paper could help to optimize the trimming process of MSRs.

Improving the quality factor of polycrystalline Si thin-film micromechanical resonators by metal-induced lateral crystallization using biomineralized Ni nanoparticles

2013 ◽  
Vol 103 (22) ◽  
pp. 223103 ◽  
Author(s):  
Shinya Kumagai ◽  
Takashi Tomikawa ◽  
Shohei Ogawa ◽  
Ichiro Yamashita ◽  
Yukiharu Uraoka ◽  
...  
Keyword(s):  
Thin Film ◽  
Quality Factor ◽  
Ni Nanoparticles ◽  
Micromechanical Resonators ◽  
Lateral Crystallization ◽  
Si Thin Film

scholarly journals Thermoelastic Damping in Vibrating Beam Accelerometer: A New Thermoelastic Finite Element Approach

2006 ◽  
Author(s):  
S. Lepage ◽  
O. Le Traon ◽  
I. Klapka ◽  
S. Masson ◽  
J. C. Golinval
Keyword(s):  
Finite Element ◽  
Quality Factor ◽  
Element Model ◽  
Analytical Models ◽  
Navigation Systems ◽  
Thermoelastic Damping ◽  
Quality Factors ◽  
Inertial Navigation Systems ◽  
Element Approach ◽  
Experimental Values

In order to respond to the demand of accurate miniature inertial navigation systems, ONERA has been working on the design of a vibrating beam accelerometer called the Vibrating Inertial Accelerometer (VIA). The accuracy of the VIA is directly related to the thermoelastic quality factor of its sensitive element, which is a beam made of quartz. In this work, thermo-piezoelectric finite element analyses of the beam are carried out in order to determine its thermoelastic quality factor. These finite element results are compared to the analytical and experimental quality factors. Due to their inherent restrictive assumptions, analytical models overestimate the quality factor while the finite element results are in good agreement with the experimental values. As the finite element model allows to take into account the real geometry of the beam and the piezoelectricity of the material, it allows to quantify more precisely the thermoelastic quality factor.

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