Self-assembled nc-Si:H thin films by low-pressure planar inductively coupled plasma CVD for applications in nc-Si solar cells

2015 ◽  
Author(s):  
Debajyoti Das ◽  
Amit Banerjee
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Plasma Cvd ◽  
Inductively Coupled ◽  
Si Solar Cells ◽  
Self Assembled

Self-assembled nc-Si-QD/a-SiC thin films from planar ICP-CVD plasma without H2-dilution: a combination of wide optical gap, high conductivity and preferred 〈220〉 crystallographic orientation, uniquely appropriate for nc-Si solar cells

RSC Advances ◽  
2016 ◽  
Vol 6 (5) ◽  
pp. 3860-3869 ◽  
Author(s):  
Debajyoti Das ◽  
Debjit Kar
Keyword(s):  
Thin Films ◽  
Solar Cells ◽  
Crystallographic Orientation ◽  
High Conductivity ◽  
Rapid Synthesis ◽  
Optical Gap ◽  
Si Solar Cells ◽  
Self Assembled

Spontaneous miniaturization and rapid synthesis of self-assembled nc-Si-QDs of 〈220〉 orientation in high crystalline nc-Si-QD/a-SiC thin films of high conductivity and wide optical gap is obtained in ICP-CVD, from (SiH4 + CH4)-plasma, without H2-dilution.

Etching mechanism of (Pb,Sr)TiO3 thin films for DRAM application using Cl2/Ar inductively coupled plasma

Vacuum ◽  
2004 ◽  
Vol 74 (3-4) ◽  
pp. 485-489 ◽  
Author(s):  
Gwan-Ha Kim ◽  
Kyoung-Tae Kim ◽  
Dong-Pyo Kim ◽  
Chang-Il Kim
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Inductively Coupled ◽  
Etching Mechanism

Effect of silane/hydrogen ratio on microcrystalline silicon thin films by remote inductively coupled plasma

2013 ◽  
Vol 113 (20) ◽  
pp. 203505 ◽  
Author(s):  
Y. N. Guo ◽  
D. Y. Wei ◽  
S. Q. Xiao ◽  
S. Y. Huang ◽  
H. P. Zhou ◽  
...  
Keyword(s):  
Thin Films ◽  
Inductively Coupled Plasma ◽  
Microcrystalline Silicon ◽  
Inductively Coupled ◽  
Silicon Thin Films
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