A study on interface and charge trapping properties of nitrided n-channel metal-oxide-semiconductor field-effect transistors by backsurface argon bombardment
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
Keyword(s):
2018 ◽
Vol 57
(6S1)
◽
pp. 06HD03
◽
Keyword(s):