scholarly journals A study on interface and charge trapping properties of nitrided n-channel metal-oxide-semiconductor field-effect transistors by backsurface argon bombardment

1997 ◽  
Vol 82 (4) ◽  
pp. 1947-1950 ◽  
Author(s):  
P. T. Lai ◽  
J. P. Xu ◽  
H. B. Lo ◽  
Y. C. Cheng
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