Effects of H, OH, and CH3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor

1997 ◽  
Vol 82 (8) ◽  
pp. 4055-4061 ◽  
Author(s):  
M. Ikeda ◽  
H. Ito ◽  
M. Hiramatsu ◽  
M. Hori ◽  
T. Goto
Keyword(s):  
Radio Frequency ◽  
Diamond Film ◽  
Parallel Plate ◽  
Film Formation ◽  
Plasma Reactor ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

2003 ◽  
Vol 93 (10) ◽  
pp. 5888-5892 ◽  
Author(s):  
Kungen Teii ◽  
Michinobu Mizumura ◽  
Shousaku Matsumura ◽  
Shinriki Teii
Keyword(s):  
Radio Frequency ◽  
Parallel Plate ◽  
Radio Frequency Plasma ◽  
Time And Space ◽  
Frequency Plasma ◽  
Electric Potentials

A linear radio frequency plasma reactor for potential and current mapping in a magnetized plasma

2015 ◽  
Vol 86 (6) ◽  
pp. 063502 ◽  
Author(s):  
E. Faudot ◽  
S. Devaux ◽  
J. Moritz ◽  
S. Heuraux ◽  
P. Molina Cabrera ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Plasma Reactor ◽  
Magnetized Plasma ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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