Diamond synthesis in capacitively coupled 13.56 MHz radio frequency plasma using parallel plate electrodes with the addition of direct current power

Y. Asakura; K. K. Chattopadhyay; S. Matsumoto; K. Hirakuri

doi:10.1116/1.581518

Diamond synthesis in capacitively coupled 13.56 MHz radio frequency plasma using parallel plate electrodes with the addition of direct current power

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.581518 ◽

1998 ◽

Vol 16 (6) ◽

pp. 3185-3189 ◽

Cited By ~ 3

Author(s):

Y. Asakura ◽

K. K. Chattopadhyay ◽

S. Matsumoto ◽

K. Hirakuri

Keyword(s):

Radio Frequency ◽

Direct Current ◽

Parallel Plate ◽

Radio Frequency Plasma ◽

Diamond Synthesis ◽

Capacitively Coupled ◽

Frequency Plasma

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Diamond synthesis by capacitively coupled radio frequency plasma with the addition of direct current power

Applied Physics Letters ◽

10.1063/1.114422 ◽

1995 ◽

Vol 67 (26) ◽

pp. 3972-3974 ◽

Cited By ~ 8

Author(s):

K. K. Chattopadhyay ◽

S. Matsumoto

Keyword(s):

Radio Frequency ◽

Direct Current ◽

Radio Frequency Plasma ◽

Diamond Synthesis ◽

Capacitively Coupled ◽

Frequency Plasma

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Characterization of an Atomospheric-Pressure Parallel-Plate Capacitively Coupled Radio-Frequency Plasma

Applied Spectroscopy ◽

10.1366/0003702914335418 ◽

1991 ◽

Vol 45 (9) ◽

pp. 1468-1477 ◽

Cited By ~ 7

Author(s):

Degui Huang ◽

M. W. Blades

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

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Influence of finite geometrical asymmetry of the electrodes in capacitively coupled radio frequency plasma

Physics of Plasmas ◽

10.1063/1.4893148 ◽

2014 ◽

Vol 21 (8) ◽

pp. 083509 ◽

Cited By ~ 15

Author(s):

B. Bora ◽

L. Soto

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

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Observations of Electron Energy Distribution Functions and Ion Bombardment Secondary Electrons in a Capacitively Coupled Radio Frequency Plasma

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms1990.119.6_866 ◽

1999 ◽

Vol 119 (6) ◽

pp. 866-871 ◽

Cited By ~ 1

Author(s):

Yasunori Ohtsu ◽

Hiroharu Fujita

Keyword(s):

Energy Distribution ◽

Radio Frequency ◽

Electron Energy ◽

Distribution Functions ◽

Radio Frequency Plasma ◽

Electron Energy Distribution ◽

Secondary Electrons ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Energy Distribution Functions

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On the role of secondary electron emission in capacitively coupled radio‐frequency plasma sheath: A theoretical ground

Plasma Processes and Polymers ◽

10.1002/ppap.201900093 ◽

2019 ◽

Vol 16 (11) ◽

pp. 1900093 ◽

Cited By ~ 2

Author(s):

Guang‐Yu Sun ◽

Han‐Wei Li ◽

An‐Bang Sun ◽

Yuan Li ◽

Bai‐Peng Song ◽

...

Keyword(s):

Radio Frequency ◽

Electron Emission ◽

Secondary Electron ◽

Secondary Electron Emission ◽

Plasma Sheath ◽

Theoretical Ground ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Frequency Plasma

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Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

Journal of Applied Physics ◽

10.1063/1.1568158 ◽

2003 ◽

Vol 93 (10) ◽

pp. 5888-5892 ◽

Cited By ~ 8

Author(s):

Kungen Teii ◽

Michinobu Mizumura ◽

Shousaku Matsumura ◽

Shinriki Teii

Keyword(s):

Radio Frequency ◽

Parallel Plate ◽

Radio Frequency Plasma ◽

Time And Space ◽

Frequency Plasma ◽

Electric Potentials

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Corrigendum: Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma (2015 Plasma Sources Sci. Technol. 24 054002)

Plasma Sources Science and Technology ◽

10.1088/0963-0252/24/6/069501 ◽

2015 ◽

Vol 24 (6) ◽

pp. 069501

Author(s):

B Bora

Keyword(s):

Radio Frequency ◽

Radio Frequency Plasma ◽

Plasma Sources ◽

Capacitively Coupled ◽

Frequency Plasma

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A comparative investigation of some analytical performance characteristics of an inductively-coupled radio frequency plasma and a capacitively-coupled microwave plasma for solution analysis by emission spectrometry

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/0584-8547(75)80040-1 ◽

1975 ◽

Vol 30 (10-11) ◽

pp. 449-469 ◽

Cited By ~ 70

Author(s):

P.W.J.M. Boumans ◽

F.J. de Boer ◽

F.J. Dahmen ◽

H. Hoelzel ◽

A. Meier

Keyword(s):

Radio Frequency ◽

Microwave Plasma ◽

Comparative Investigation ◽

Performance Characteristics ◽

Analytical Performance ◽

Emission Spectrometry ◽

Radio Frequency Plasma ◽

Capacitively Coupled ◽

Inductively Coupled ◽

Frequency Plasma

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Hydrophobic over-recovery during aging of polyethylene modified by oxygen capacitively coupled radio frequency plasma: A new approach for stable superhydrophobic surface with high water adhesion

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2012.05.120 ◽

2012 ◽

Vol 206 (23) ◽

pp. 4952-4958 ◽

Cited By ~ 20

Author(s):

Y.P. Li ◽

S.Y. Li ◽

W. Shi ◽

M.K. Lei

Keyword(s):

Radio Frequency ◽

Superhydrophobic Surface ◽

High Water ◽

Radio Frequency Plasma ◽

New Approach ◽

Capacitively Coupled ◽

Frequency Plasma ◽

Water Adhesion

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Effects of H, OH, and CH3 radicals on diamond film formation in parallel-plate radio frequency plasma reactor

Journal of Applied Physics ◽

10.1063/1.365715 ◽

1997 ◽

Vol 82 (8) ◽

pp. 4055-4061 ◽

Cited By ~ 31

Author(s):

M. Ikeda ◽

H. Ito ◽

M. Hiramatsu ◽

M. Hori ◽

T. Goto

Keyword(s):

Radio Frequency ◽

Diamond Film ◽

Parallel Plate ◽

Film Formation ◽

Plasma Reactor ◽

Radio Frequency Plasma ◽

Frequency Plasma

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