microcrystalline silicon film
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Modeling and experiments of microcrystalline silicon film deposited via VHF-PECVD

Solar Energy ◽  
2013 ◽  
Vol 94 ◽  
pp. 155-161
Author(s):  
Yongsheng Chen ◽  
Xiping Chen ◽  
Yuechao Jiao ◽  
Xiuli Hao ◽  
Jingxiao Lu ◽  
...  
Keyword(s):  
Silicon Film ◽  
Microcrystalline Silicon ◽  
Modeling And Experiments ◽  
Microcrystalline Silicon Film

Laser Marking on Microcrystalline Silicon Film

2012 ◽  
Vol 12 (7) ◽  
pp. 5609-5612
Author(s):  
Min Gyu Park ◽  
Se-Bum Choi ◽  
Hyun Ruh ◽  
Hae-Sook Hwang ◽  
Hyunung Yu
Keyword(s):  
Silicon Film ◽  
Microcrystalline Silicon ◽  
Laser Marking ◽  
Microcrystalline Silicon Film

Large-Area and High-Speed Deposition of Microcrystalline Silicon Film by Inductive Coupled Plasma using Internal Low-Inductance Antenna

2007 ◽  
Vol 46 (3B) ◽  
pp. 1280-1285 ◽  
Author(s):  
Eiji Takahashi ◽  
Yasuaki Nishigami ◽  
Atsushi Tomyo ◽  
Masaki Fujiwara ◽  
Hirokazu Kaki ◽  
...  
Keyword(s):  
High Speed ◽  
Silicon Film ◽  
Microcrystalline Silicon ◽  
Large Area ◽  
Microcrystalline Silicon Film

scholarly journals The influence of deposition temperature on the structure of microcrystalline silicon film

2007 ◽  
Vol 56 (7) ◽  
pp. 4122
Author(s):  
Chen Yong-Sheng ◽  
Gao Xiao-Yong ◽  
Yang Shi-E ◽  
Lu Jing-Xiao ◽  
Gu Jin-Hua
Keyword(s):  
Deposition Temperature ◽  
Silicon Film ◽  
Microcrystalline Silicon ◽  
Microcrystalline Silicon Film

scholarly journals Study of the structural and optical properties of microcrystalline silicon film

2006 ◽  
Vol 55 (1) ◽  
pp. 98
Author(s):  
Gao Xiao-Yong ◽  
Li Rui ◽  
Chen Yong-Sheng ◽  
Lu Jing-Xiao ◽  
Liu Ping ◽  
...  
Keyword(s):  
Optical Properties ◽  
Silicon Film ◽  
Microcrystalline Silicon ◽  
Structural And Optical Properties ◽  
Microcrystalline Silicon Film
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