Energy resolved angular distribution of argon ions at the substrate plane of a radio frequency plasma reactor

1992 ◽  
Vol 10 (6) ◽  
pp. 3522-3531 ◽  
Author(s):  
Joachim Janes ◽  
Christoph Huth
Keyword(s):  
Angular Distribution ◽  
Radio Frequency ◽  
Plasma Reactor ◽  
Radio Frequency Plasma ◽  
Substrate Plane ◽  
Frequency Plasma ◽  
Argon Ions

A linear radio frequency plasma reactor for potential and current mapping in a magnetized plasma

2015 ◽  
Vol 86 (6) ◽  
pp. 063502 ◽  
Author(s):  
E. Faudot ◽  
S. Devaux ◽  
J. Moritz ◽  
S. Heuraux ◽  
P. Molina Cabrera ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Plasma Reactor ◽  
Magnetized Plasma ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Modeling of and experiments on dust particle levitation in the sheath of a radio frequency plasma reactor

2005 ◽  
Vol 97 (4) ◽  
pp. 043306 ◽  
Author(s):  
Heru Setyawan ◽  
Manabu Shimada ◽  
Yutaka Hayashi ◽  
Kikuo Okuyama ◽  
Sugeng Winardi
Keyword(s):  
Radio Frequency ◽  
Dust Particle ◽  
Plasma Reactor ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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