Influence of the ratio of the electron temperatures at the electrodes on the current oscillations in a radio‐frequency plasma reactor

1994 ◽  
Vol 12 (5) ◽  
pp. 2936-2937 ◽  
Author(s):  
R. Deutsch ◽  
U. Erz ◽  
M. Pohle ◽  
E. Räuchle ◽  
J. Schwarz
Keyword(s):  
Radio Frequency ◽  
Plasma Reactor ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Current Oscillations

A linear radio frequency plasma reactor for potential and current mapping in a magnetized plasma

2015 ◽  
Vol 86 (6) ◽  
pp. 063502 ◽  
Author(s):  
E. Faudot ◽  
S. Devaux ◽  
J. Moritz ◽  
S. Heuraux ◽  
P. Molina Cabrera ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Plasma Reactor ◽  
Magnetized Plasma ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Modeling of and experiments on dust particle levitation in the sheath of a radio frequency plasma reactor

2005 ◽  
Vol 97 (4) ◽  
pp. 043306 ◽  
Author(s):  
Heru Setyawan ◽  
Manabu Shimada ◽  
Yutaka Hayashi ◽  
Kikuo Okuyama ◽  
Sugeng Winardi
Keyword(s):  
Radio Frequency ◽  
Dust Particle ◽  
Plasma Reactor ◽  
Radio Frequency Plasma ◽  
Frequency Plasma
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