Ion energy and angular distributions in inductively driven radio frequency discharges in chlorine

1997 ◽  
Vol 81 (9) ◽  
pp. 5950-5959 ◽  
Author(s):  
J. R. Woodworth ◽  
M. E. Riley ◽  
P. A. Miller ◽  
G. A. Hebner ◽  
T. W. Hamilton
Keyword(s):  
Radio Frequency ◽  
Angular Distributions ◽  
Ion Energy ◽  
Radio Frequency Discharges ◽  
Energy And Angular Distributions

Ion energy and angular distributions in inductively coupled radio frequency discharges in argon

1996 ◽  
Vol 80 (3) ◽  
pp. 1304-1311 ◽  
Author(s):  
Joseph R. Woodworth ◽  
Merle E. Riley ◽  
Dorothy C. Meister ◽  
Ben P. Aragon ◽  
Minh S. Le ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Angular Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Radio Frequency Discharges ◽  
Energy And Angular Distributions

Numerical investigation of ion energy and angular distributions in a dc-biased H2 inductively coupled discharge

2020 ◽  
Vol 27 (9) ◽  
pp. 093512
Author(s):  
Sha-Sha Song ◽  
Wei Liu ◽  
Shuai Yin ◽  
Yong-Xin Liu ◽  
Fei Gao ◽  
...  
Keyword(s):  
Numerical Investigation ◽  
Angular Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Energy And Angular Distributions
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