Ion energy distribution functions in inductively coupled radio-frequency discharges—Mixtures of Cl2/BCl3/Ar

1998 ◽  
Vol 16 (6) ◽  
pp. 3389-3395 ◽  
Author(s):  
C. A. Nichols ◽  
J. R. Woodworth ◽  
T. W. Hamilton
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Distribution Functions ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Inductively Coupled ◽  
Radio Frequency Discharges ◽  
Energy Distribution Functions

scholarly journals Ion energy distribution functions behind the sheaths of magnetized and non-magnetized radio frequency discharges

2013 ◽  
Vol 46 (8) ◽  
pp. 084016 ◽  
Author(s):  
Jan Trieschmann ◽  
Mohammed Shihab ◽  
Daniel Szeremley ◽  
Abd Elfattah Elgendy ◽  
Sara Gallian ◽  
...  
Keyword(s):  
Energy Distribution ◽  
Radio Frequency ◽  
Distribution Functions ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Radio Frequency Discharges ◽  
Energy Distribution Functions

Behavior of Time-Resolved Ion Energy Distribution Functions during Ion-Ion Instability

1993 ◽  
Vol 32 (Part 1, No. 10) ◽  
pp. 4756-4760
Author(s):  
Yoshifumi Saitou ◽  
Yoshiharu Nakamura ◽  
Masayoshi Tanaka ◽  
Akio Komori ◽  
Yoshinobu Kawai
Keyword(s):  
Energy Distribution ◽  
Distribution Functions ◽  
Time Resolved ◽  
Ion Energy ◽  
Ion Energy Distribution ◽  
Energy Distribution Functions
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