radio frequency discharges
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Similarity of capacitive radio-frequency discharges in nonlocal regimes

2020 ◽  
Vol 27 (11) ◽  
pp. 113501
Author(s):  
Yangyang Fu ◽  
Bocong Zheng ◽  
Peng Zhang ◽  
Qi Hua Fan ◽  
John P. Verboncoeur ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Radio Frequency Discharges

scholarly journals N2–H2 capacitively coupled radio-frequency discharges at low pressure: II. Modeling results: the relevance of plasma-surface interaction

2020 ◽  
Vol 29 (8) ◽  
pp. 085023 ◽  
Author(s):  
Miguel Jiménez-Redondo ◽  
Audrey Chatain ◽  
Olivier Guaitella ◽  
Guy Cernogora ◽  
Nathalie Carrasco ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Surface Interaction ◽  
Capacitively Coupled ◽  
Plasma Surface ◽  
Radio Frequency Discharges

A novel ex situ diagnostic technique for characterizing harmonics in radio frequency discharges

2020 ◽  
Vol 91 (9) ◽  
pp. 094705
Author(s):  
Arti Rawat ◽  
A. Ganguli ◽  
Ramesh Narayanan ◽  
R. D. Tarey
Keyword(s):  
Radio Frequency ◽  
Diagnostic Technique ◽  
Ex Situ ◽  
Radio Frequency Discharges

scholarly journals Electron dynamics in low pressure capacitively coupled radio frequency discharges

2020 ◽  
Vol 127 (18) ◽  
pp. 181101 ◽  
Author(s):  
S. Wilczek ◽  
J. Schulze ◽  
R. P. Brinkmann ◽  
Z. Donkó ◽  
J. Trieschmann ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Low Pressure ◽  
Electron Dynamics ◽  
Capacitively Coupled ◽  
Radio Frequency Discharges
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