Control of ion energy and angular distributions in dual-frequency capacitively coupled plasmas through power ratios and phase: Consequences on etch profiles

Yiting Zhang; Mark J. Kushner; Saravanapriyan Sriraman; Alexei Marakhtanov; John Holland; Alex Paterson

doi:10.1116/1.4915248

Control of ion energy and angular distributions in dual-frequency capacitively coupled plasmas through power ratios and phase: Consequences on etch profiles

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4915248 ◽

2015 ◽

Vol 33 (3) ◽

pp. 031302 ◽

Cited By ~ 19

Author(s):

Yiting Zhang ◽

Mark J. Kushner ◽

Saravanapriyan Sriraman ◽

Alexei Marakhtanov ◽

John Holland ◽

...

Keyword(s):

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions ◽

Coupled Plasmas

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Space and phase resolved ion energy and angular distributions in single- and dual-frequency capacitively coupled plasmas

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4822100 ◽

2013 ◽

Vol 31 (6) ◽

pp. 061311 ◽

Cited By ~ 12

Author(s):

Yiting Zhang ◽

Mark J. Kushner ◽

Nathaniel Moore ◽

Patrick Pribyl ◽

Walter Gekelman

Keyword(s):

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions ◽

Coupled Plasmas

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Ion Energy and Angular Distributions in a Dual-Frequency Capacitively Coupled Chlorine Discharge

IEEE Transactions on Plasma Science ◽

10.1109/tps.2014.2323816 ◽

2014 ◽

Vol 42 (10) ◽

pp. 2854-2855 ◽

Cited By ~ 4

Author(s):

Shuo Huang ◽

Jon Tomas Gudmundsson

Keyword(s):

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions

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Numerical study of ion energy and angular distributions in dual‐frequency capacitively coupled CF4 plasmas

Physics of Plasmas ◽

10.1063/1.3684675 ◽

2012 ◽

Vol 19 (2) ◽

pp. 023506 ◽

Cited By ~ 5

Author(s):

Wang Shuai ◽

Xu Xiang ◽

Wang Younian

Keyword(s):

Numerical Study ◽

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions

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Ion energy and angular distributions in planar Ar/O2 inductively coupled plasmas: hybrid simulation and experimental validation

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ab1dd3 ◽

2019 ◽

Vol 52 (29) ◽

pp. 295204

Author(s):

Yu-Ru Zhang ◽

Zhuan-Zhuan Zhao ◽

Chan Xue ◽

Fei Gao ◽

You-Nian Wang

Keyword(s):

Experimental Validation ◽

Hybrid Simulation ◽

Angular Distributions ◽

Inductively Coupled Plasmas ◽

Ion Energy ◽

Inductively Coupled ◽

Energy And Angular Distributions ◽

Coupled Plasmas

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Ion energy and angular distributions into the wafer–focus ring gap in capacitively coupled discharges

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/41/6/062004 ◽

2008 ◽

Vol 41 (6) ◽

pp. 062004 ◽

Cited By ~ 16

Author(s):

Natalia Y Babaeva ◽

Mark J Kushner

Keyword(s):

Angular Distributions ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions

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Review of ion energy and angular distributions in capacitively coupled RF plasma reactors

International Conference on Plasma Science (papers in summary form only received) ◽

10.1109/plasma.1995.533248 ◽

1995 ◽

Author(s):

E. Kawamura ◽

V. Vahedi ◽

M.A. Lieberman ◽

C.K. Birdsall

Keyword(s):

Angular Distributions ◽

Rf Plasma ◽

Plasma Reactors ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions ◽

Rf Plasma Reactors

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Prediction of Ion Energy and Angular Distributions in Single and Dual Frequency Plasmas

Journal of The Electrochemical Society ◽

10.1149/1.2054916 ◽

1994 ◽

Vol 141 (5) ◽

pp. 1313-1320 ◽

Cited By ~ 12

Author(s):

Frank R. Myers ◽

Manjula Ramaswami ◽

Timothy S. Cale

Keyword(s):

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Energy And Angular Distributions

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A self-consistent hybrid model of a dual frequency sheath: Ion energy and angular distributions

Physics of Plasmas ◽

10.1063/1.2434250 ◽

2007 ◽

Vol 14 (1) ◽

pp. 013507 ◽

Cited By ~ 27

Author(s):

Zhong-Ling Dai ◽

Xiang Xu ◽

You-Nian Wang

Keyword(s):

Hybrid Model ◽

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Self Consistent ◽

Energy And Angular Distributions

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Experimental investigations of the effect of the neutral gas pressure on the separate control of ion energy and flux in dual frequency capacitively coupled plasmas

Physics of Plasmas ◽

10.1063/1.5094603 ◽

2019 ◽

Vol 26 (8) ◽

pp. 083505 ◽

Cited By ~ 1

Author(s):

Partha Saikia ◽

Heman Bhuyan ◽

Seong Ling Yap ◽

Miguel Escalona ◽

Mario Favre ◽

...

Keyword(s):

Gas Pressure ◽

Experimental Investigations ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Neutral Gas ◽

Separate Control ◽

Coupled Plasmas

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Experimental investigations of electron density and ion energy distributions in dual-frequency capacitively coupled plasmas for Ar/CF4 and Ar/O2/CF4 discharges

Journal of Applied Physics ◽

10.1063/1.4859595 ◽

2014 ◽

Vol 115 (1) ◽

pp. 013301 ◽

Cited By ~ 13

Author(s):

Jia Liu ◽

Yong-Xin Liu ◽

Zhen-Hua Bi ◽

Fei Gao ◽

You-Nian Wang

Keyword(s):

Electron Density ◽

Experimental Investigations ◽

Dual Frequency ◽

Energy Distributions ◽

Ion Energy ◽

Capacitively Coupled ◽

Ion Energy Distributions ◽

Coupled Plasmas

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