scholarly journals Ion energy and angular distributions in inductively driven RF discharges in chlorine

1996 ◽  
Author(s):  
J.R. Woodworth ◽  
M.E. Riley ◽  
T.W. Hamilton
Keyword(s):  
Angular Distributions ◽  
Ion Energy ◽  
Rf Discharges ◽  
Energy And Angular Distributions

scholarly journals Ion energy and angular distributions in low-pressure capacitive oxygen RF discharges driven by tailored voltage waveforms

2018 ◽  
Vol 27 (10) ◽  
pp. 104008 ◽  
Author(s):  
Zoltán Donkó ◽  
Aranka Derzsi ◽  
Máté Vass ◽  
Julian Schulze ◽  
Edmund Schuengel ◽  
...  
Keyword(s):  
Low Pressure ◽  
Angular Distributions ◽  
Ion Energy ◽  
Rf Discharges ◽  
Energy And Angular Distributions

Numerical investigation of ion energy and angular distributions in a dc-biased H2 inductively coupled discharge

2020 ◽  
Vol 27 (9) ◽  
pp. 093512
Author(s):  
Sha-Sha Song ◽  
Wei Liu ◽  
Shuai Yin ◽  
Yong-Xin Liu ◽  
Fei Gao ◽  
...  
Keyword(s):  
Numerical Investigation ◽  
Angular Distributions ◽  
Ion Energy ◽  
Inductively Coupled ◽  
Energy And Angular Distributions

Ion energy and angular distributions in inductively driven radio frequency discharges in chlorine

1997 ◽  
Vol 81 (9) ◽  
pp. 5950-5959 ◽  
Author(s):  
J. R. Woodworth ◽  
M. E. Riley ◽  
P. A. Miller ◽  
G. A. Hebner ◽  
T. W. Hamilton
Keyword(s):  
Radio Frequency ◽  
Angular Distributions ◽  
Ion Energy ◽  
Radio Frequency Discharges ◽  
Energy And Angular Distributions
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