Numerical investigation of ion energy and angular distributions in a dc-biased H2 inductively coupled discharge

Sha-Sha Song; Wei Liu; Shuai Yin; Yong-Xin Liu; Fei Gao; You-Nian Wang; Yong-Tao Zhao

doi:10.1063/5.0012770

Numerical investigation of ion energy and angular distributions in a dc-biased H2 inductively coupled discharge

Physics of Plasmas ◽

10.1063/5.0012770 ◽

2020 ◽

Vol 27 (9) ◽

pp. 093512

Author(s):

Sha-Sha Song ◽

Wei Liu ◽

Shuai Yin ◽

Yong-Xin Liu ◽

Fei Gao ◽

...

Keyword(s):

Numerical Investigation ◽

Angular Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Energy And Angular Distributions

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Ion energy and angular distributions in planar Ar/O2 inductively coupled plasmas: hybrid simulation and experimental validation

Journal of Physics D Applied Physics ◽

10.1088/1361-6463/ab1dd3 ◽

2019 ◽

Vol 52 (29) ◽

pp. 295204

Author(s):

Yu-Ru Zhang ◽

Zhuan-Zhuan Zhao ◽

Chan Xue ◽

Fei Gao ◽

You-Nian Wang

Keyword(s):

Experimental Validation ◽

Hybrid Simulation ◽

Angular Distributions ◽

Inductively Coupled Plasmas ◽

Ion Energy ◽

Inductively Coupled ◽

Energy And Angular Distributions ◽

Coupled Plasmas

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Numerical investigation of RF pulsing effet on ion energy and angular distributions

2013 Abstracts IEEE International Conference on Plasma Science (ICOPS) ◽

10.1109/plasma.2013.6633364 ◽

2013 ◽

Author(s):

Deuk-Chul Kwon ◽

Mi-Young Song ◽

Jung-Sik Yoon

Keyword(s):

Numerical Investigation ◽

Angular Distributions ◽

Ion Energy ◽

Energy And Angular Distributions

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Two-dimensional simulation of ion energy and angular distributions at the wafer in RF biased inductively coupled chlorine plasmas

IEEE Conference Record - Abstracts. PPPS-2001 Pulsed Power Plasma Science 2001. 28th IEEE International Conference on Plasma Science and 13th IEEE International Pulsed Power Conference (Cat. No.01CH37255) ◽

10.1109/ppps.2001.961275 ◽

2002 ◽

Author(s):

W.C. Lin ◽

Y. Hu ◽

T.L. Lin

Keyword(s):

Angular Distributions ◽

Two Dimensional ◽

Ion Energy ◽

Inductively Coupled ◽

Dimensional Simulation ◽

Energy And Angular Distributions

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Ion energy and angular distributions in inductively coupled Argon RF discharges

10.2172/212756 ◽

1996 ◽

Author(s):

J.R. Woodworth ◽

M.E. Riley ◽

D.C. Meister

Keyword(s):

Angular Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Rf Discharges ◽

Energy And Angular Distributions

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Ion energy and angular distributions in inductively coupled radio frequency discharges in argon

Journal of Applied Physics ◽

10.1063/1.362977 ◽

1996 ◽

Vol 80 (3) ◽

pp. 1304-1311 ◽

Cited By ~ 94

Author(s):

Joseph R. Woodworth ◽

Merle E. Riley ◽

Dorothy C. Meister ◽

Ben P. Aragon ◽

Minh S. Le ◽

...

Keyword(s):

Radio Frequency ◽

Angular Distributions ◽

Ion Energy ◽

Inductively Coupled ◽

Radio Frequency Discharges ◽

Energy And Angular Distributions

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Control of ion energy and angular distributions using voltage waveform

IEEE Conference Record - Abstracts. 1999 IEEE International Conference on Plasma Science. 26th IEEE International Conference (Cat. No.99CH36297) ◽

10.1109/plasma.1999.829297 ◽

2003 ◽

Author(s):

S. Rauf

Keyword(s):

Angular Distributions ◽

Voltage Waveform ◽

Ion Energy ◽

Energy And Angular Distributions

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Control of ion energy and angular distributions in dual-frequency capacitively coupled plasmas through power ratios and phase: Consequences on etch profiles

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.4915248 ◽

2015 ◽

Vol 33 (3) ◽

pp. 031302 ◽

Cited By ~ 19

Author(s):

Yiting Zhang ◽

Mark J. Kushner ◽

Saravanapriyan Sriraman ◽

Alexei Marakhtanov ◽

John Holland ◽

...

Keyword(s):

Angular Distributions ◽

Dual Frequency ◽

Ion Energy ◽

Capacitively Coupled ◽

Energy And Angular Distributions ◽

Coupled Plasmas

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Ion energy and angular distributions in inductively driven RF discharges in chlorine

10.2172/231654 ◽

1996 ◽

Author(s):

J.R. Woodworth ◽

M.E. Riley ◽

T.W. Hamilton

Keyword(s):

Angular Distributions ◽

Ion Energy ◽

Rf Discharges ◽

Energy And Angular Distributions

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Ion energy and angular distributions onto polymer surfaces delivered by dielectric barrier discharge filaments in air: II. Particles

Plasma Sources Science and Technology ◽

10.1088/0963-0252/20/3/035018 ◽

2011 ◽

Vol 20 (3) ◽

pp. 035018 ◽

Cited By ~ 5

Author(s):

Natalia Yu Babaeva ◽

Mark J Kushner

Keyword(s):

Dielectric Barrier Discharge ◽

Barrier Discharge ◽

Polymer Surfaces ◽

Angular Distributions ◽

Dielectric Barrier ◽

Ion Energy ◽

Energy And Angular Distributions

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Calculation of the backscattered ion energy and angular distributions during the grazing implantation

Vacuum ◽

10.1016/0042-207x(95)80075-1 ◽

1995 ◽

Vol 46 (4) ◽

pp. 383-388 ◽

Cited By ~ 2

Author(s):

IE Mozolevsky

Keyword(s):

Angular Distributions ◽

Ion Energy ◽

Energy And Angular Distributions

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