A quantitative analysis of strain relaxation by misfit dislocation glide in Si1−xGex/Si heterostructures

1990 ◽  
Vol 68 (4) ◽  
pp. 1526-1534 ◽  
Author(s):  
C. G. Tuppen ◽  
C. J. Gibbings
Keyword(s):  
Quantitative Analysis ◽  
Misfit Dislocation ◽  
Strain Relaxation ◽  
Dislocation Glide

Control of misfit dislocation glide plane distribution during strain relaxation of CuPt-ordered GaInAs and GaInP

2012 ◽  
Vol 112 (2) ◽  
pp. 023520 ◽  
Author(s):  
R. M. France ◽  
W. E. McMahon ◽  
A. G. Norman ◽  
J. F. Geisz ◽  
M. J. Romero
Keyword(s):  
Misfit Dislocation ◽  
Strain Relaxation ◽  
Dislocation Glide ◽  
Plane Distribution

Development of Cross-Hatch Morphology During Growth of Lattice Mismatched Layers

2001 ◽  
Vol 673 ◽  
Author(s):  
A. Maxwell Andrews ◽  
J.S. Speck ◽  
A.E. Romanov ◽  
M. Bobeth ◽  
W. Pompe
Keyword(s):  
Misfit Dislocation ◽  
Film Growth ◽  
Strain Relaxation ◽  
Dislocation Generation ◽  
Force Microscopy ◽  
Step Flow ◽  
Atomic Force ◽  
Subsequent Step ◽  
Step Flow Growth ◽  
Lateral Scale

ABSTRACTAn approach is developed for understanding the cross-hatch morphology in lattice mismatched heteroepitaxial film growth. It is demonstrated that both strain relaxation associated with misfit dislocation formation and subsequent step elimination (e.g. by step-flow growth) are responsible for the appearance of nanoscopic surface height undulations (0.1-10 nm) on a mesoscopic (∼100 nm) lateral scale. The results of Monte Carlo simulations for dislocation- assisted strain relaxation and subsequent film growth predict the development of cross-hatch patterns with a characteristic surface undulation magnitude ∼50 Å in an approximately 70% strain relaxed In0.25Ga0.75As layers. The model is supported by atomic force microscopy (AFM) observations of cross-hatch morphology in the same composition samples grown well beyond the critical thickness for misfit dislocation generation.

The barrier to misfit dislocation glide in continuous, strained, epitaxial layers on patterned substrates

1993 ◽  
Vol 74 (5) ◽  
pp. 3103-3110 ◽  
Author(s):  
G. Patrick Watson ◽  
Dieter G. Ast ◽  
Timothy J. Anderson ◽  
Balu Pathangey
Keyword(s):  
Misfit Dislocation ◽  
Epitaxial Layers ◽  
Patterned Substrates ◽  
Dislocation Glide

The Roles of Stress, Geometry and Orientation on Misfit Dislocations Kinetics and Energetics in Epitaxial Strained Layers.

1991 ◽  
Vol 239 ◽  
Author(s):  
R. Hull ◽  
J. C. Bean ◽  
F. Ross ◽  
D. Bahnck ◽  
L. J. Pencolas
Keyword(s):  
Misfit Dislocation ◽  
Lattice Mismatch ◽  
Strain Relaxation ◽  
Misfit Dislocations ◽  
Slip Systems ◽  
Strained Layers ◽  
Burgers Vector ◽  
Partial Dislocations ◽  
Strain Stress ◽  
Kinetics Of

ABSTRACTThe geometries, microstructures, energetics and kinetics of misfit dislocations as functions of surface orientation and the magnitude of strain/stress are investigated experimentally and theoretically. Examples are drawn from (100), (110) and (111) surfaces and from the GexSi1–x/Si and InxGa1–x/GaAs systems. It is shown that the misfit dislocation geometries and microstructures at lattice mismatch stresses < - 1GPa may in general be predicted by operation of the minimum magnitude Burgers vector slipping on the widest spaced planes. At stresses of the order several GPa, however, new dislocation systems may become operative with either modified Burgers vectors or slip systems. Dissociation of totál misfit dislocations into partial dislocations is found to play a crucial role in strain relaxation, on surfaces other than (100) under compressive stress.

Strain relaxation in ultrathin films: A modified theory of misfit-dislocation energetics

1993 ◽  
Vol 47 (20) ◽  
pp. 13730-13736 ◽  
Author(s):  
A. P. Payne ◽  
B. M. Lairson ◽  
B. M. Clemens
Keyword(s):  
Misfit Dislocation ◽  
Ultrathin Films ◽  
Strain Relaxation ◽  
Modified Theory

scholarly journals Strain relaxation by dislocation glide in ZnO/ZnMgO core-shell nanowires

2012 ◽  
Vol 100 (17) ◽  
pp. 173102 ◽  
Author(s):  
G. Perillat-Merceroz ◽  
R. Thierry ◽  
P.-H. Jouneau ◽  
P. Ferret ◽  
G. Feuillet
Keyword(s):  
Strain Relaxation ◽  
Core Shell ◽  
Dislocation Glide ◽  
Shell Nanowires

Strain Relaxation Mechanisms in He+-Implanted and Annealed Si1−xGex Layers on Si(001) Substrates

2001 ◽  
Vol 686 ◽  
Author(s):  
S.H. Christiansen ◽  
P.M. Mooney ◽  
J.O. Chu ◽  
A. Grill
Keyword(s):  
Misfit Dislocation ◽  
Strain Relaxation ◽  
Three Dimensional ◽  
Dislocation Network ◽  
Misfit Dislocations ◽  
Dislocation Loops ◽  
X Ray Diffraction ◽  
Si Substrate ◽  
Transmission Electron ◽  
Microscopy Techniques

AbstractStrain relaxation in He+-implanted and annealed Si(001)/Si1−xGex heterostructures was investigated using transmission electron microscopy techniques and x-ray diffraction. Depending on the implant conditions, bubbles and/or platelets form below the Si/Si1−xGex interface upon annealing and act as nucleation sources for dislocation loops. The dislocation loops extend to the interface and form a misfit dislocation network there, resulting in relaxation of 30-80% of the strain in layers as thin as 100-300 nm. When bubbles form close to the interface, dislocations nucleate by a climb loop mechanism. When smaller bubbles form deeper in the Si substrate an irregular three-dimensional dislocation network forms below the interface resulting in an irregular misfit dislocation network at the interface. When platelets form deeper in the Si substrate, prismatic punching of dislocation loops is observed and dislocation reactions of misfit dislocations at the interface result in Lomer dislocation formation.

Misfit dislocation formation via pre-existing threading dislocation glide in (112¯2) semipolar heteroepitaxy

2011 ◽  
Vol 99 (8) ◽  
pp. 081912 ◽  
Author(s):  
Po Shan Hsu ◽  
Erin C. Young ◽  
Alexey E. Romanov ◽  
Kenji Fujito ◽  
Steven P. DenBaars ◽  
...  
Keyword(s):  
Misfit Dislocation ◽  
Threading Dislocation ◽  
Dislocation Glide ◽  
Dislocation Formation

A Theoretical Calculation of Misfit Dislocation and Strain Relaxation in Step-graded InxGa 1-x N/GaN Layers

2011 ◽  
Vol 403-408 ◽  
pp. 456-460 ◽  
Author(s):  
Md. Arafat Hossain ◽  
Md. Rafiqul Islam
Keyword(s):  
Theoretical Calculation ◽  
Layer Thickness ◽  
Misfit Dislocation ◽  
Residual Strain ◽  
Critical Thickness ◽  
Strain Relaxation ◽  
Misfit Strain ◽  
Misfit Dislocations ◽  
Uniform Layer ◽  
Dislocation Energy

This paper presents a theoretical calculation of misfit dislocation and strain relaxation in compositionally step graded InxGa1-xN grown on GaN using the total dislocation energy at each interface. The results also compared with uniform layer of In0.17Ga0.83N and In0.14Ga0.86N grown differently on GaN. Due to having residual strain and a step increase in indium composition a lower misfit strain in upper layers and hence larger critical thickness at each interface has been reported. These effects significantly reduced the misfit dislocations from 2.6×105cm-1to 9.5×104cm-1in step graded In0.14Ga0.86N(500nm)/In0.09Ga0.91N(100nm)/In0.05Ga0.95N(100nm)/GaN layers instead of a uniform In0.14Ga0.86N(700nm)/GaN. A small residual strain of 0.0007 after 700 nm graded layer thickness has been reported with 87.04% strain relaxation.

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