All low voltage lateral junction scanning tunneling microscope with very high precision and stability

2008 ◽  
Vol 79 (11) ◽  
pp. 113707 ◽  
Author(s):  
Yubin Hou ◽  
Jihui Wang ◽  
Qingyou Lu
Keyword(s):  
High Precision ◽  
Scanning Tunneling Microscope ◽  
Low Voltage ◽  
Scanning Tunneling ◽  
Tunneling Microscope ◽  
Very High

Low voltage electron beam lithography in self‐assembled ultrathin films with the scanning tunneling microscope

1994 ◽  
Vol 64 (3) ◽  
pp. 390-392 ◽  
Author(s):  
C. R. K. Marrian ◽  
F. K. Perkins ◽  
S. L. Brandow ◽  
T. S. Koloski ◽  
E. A. Dobisz ◽  
...  
Keyword(s):  
Electron Beam ◽  
Ultrathin Films ◽  
Electron Beam Lithography ◽  
Scanning Tunneling Microscope ◽  
Low Voltage ◽  
Scanning Tunneling ◽  
Tunneling Microscope ◽  
Voltage Electron ◽  
Self Assembled

Low Voltage e-Beam Lithography with the Scanning Tunneling Microscope

1994 ◽  
pp. 175-188 ◽  
Author(s):  
C. R. K. Marrian ◽  
F. K. Perkins ◽  
S. L. Brandow ◽  
T. S. Koloski ◽  
E. A. Dobisz ◽  
...  
Keyword(s):  
Scanning Tunneling Microscope ◽  
Low Voltage ◽  
Scanning Tunneling ◽  
Tunneling Microscope

GaAs and Si Assisted Etching using a Scanning Tunneling Microscope

1991 ◽  
Vol 236 ◽  
Author(s):  
Masakazu Baba ◽  
Shinji Matsui
Keyword(s):  
Scanning Tunneling Microscope ◽  
Gas Flow ◽  
Low Voltage ◽  
Atomic Layer ◽  
Flow Time ◽  
Scanning Tunneling ◽  
Tunneling Microscope ◽  
Etching Profile ◽  
Atomic Layer Etching

AbstractGaAs etching with Cl2 gas is studied with a scanning tunneling microscope (STM). Both Cl2 gas and tunnel electron assist etching occur under the tip during scanning and the etching profile is found to depend on the gas flow time. GaAs and Si patterns with nanometer dimensions are fabricated by STM assist etching with a very low voltage (-IV). Also atomic layer etching of GaAs is demonstrated by STM assist-etching using a Cl adlayer.

Scanning tunneling microscope for ultra-high vacuum with a high-precision coarse positioning

1993 ◽  
Vol 48 (3) ◽  
pp. 315-320 ◽  
Author(s):  
J. Méndez ◽  
J. Gómez-Herrero ◽  
Huang Wen Hao ◽  
A.M. Baró
Keyword(s):  
High Precision ◽  
Scanning Tunneling Microscope ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
Scanning Tunneling ◽  
Tunneling Microscope
Sign in / Sign up

Export Citation Format

Share Document