NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies
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Published By Springer Netherlands

9789048143887, 9789401582612

Latest Documents Most Cited Documents Contributed Authors Related Sources Related Keywords

Sub-10nm Electron Beam Lithography: -AIF3-Doped Lithium Fluoride as a Resist

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies ◽

10.1007/978-94-015-8261-2_5 ◽

1994 ◽

pp. 53-66 ◽

Cited By ~ 2

Author(s):

Wolfram Langheinrich ◽

Heinz Beneking

Keyword(s):

Electron Beam ◽

Electron Beam Lithography ◽

Lithium Fluoride

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Intense Focused Ion Beams for Nanostructurisation

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies ◽

10.1007/978-94-015-8261-2_15 ◽

1994 ◽

pp. 137-147

Author(s):

S. Kalbitzer ◽

Ch. Wilbertz ◽

Th. Miller

Keyword(s):

Ion Beams ◽

Focused Ion Beams

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X-ray Phase Shifting Masks

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies ◽

10.1007/978-94-015-8261-2_13 ◽

1994 ◽

pp. 121-127

Author(s):

F. Cerrina ◽

J. Xiao ◽

Z. Y. Guo

Keyword(s):

Phase Shifting ◽

X Ray

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Nano-Lithography in 3 Dimensions with Electron Beam Induced Deposition

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies ◽

10.1007/978-94-015-8261-2_10 ◽

1994 ◽

pp. 87-93 ◽

Cited By ~ 3

Author(s):

H. W. P. Koops ◽

M. Rudolph ◽

J. Kretz ◽

M. Weber

Keyword(s):

Electron Beam ◽

Electron Beam Induced Deposition

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Nanolithography, The Integrated System

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies ◽

10.1007/978-94-015-8261-2_1 ◽

1994 ◽

pp. 1-11

Author(s):

Fritz J. Hohn

Keyword(s):

Integrated System

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Patterning of InGaAs/GaAs Quantum Dots Using E-Beam Lithography and Selective Removal of the Top Barrier

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies ◽

10.1007/978-94-015-8261-2_7 ◽

1994 ◽

pp. 73-76

Author(s):

A. Schmidt ◽

F. Faller ◽

A. Forchel

Keyword(s):

Quantum Dots ◽

Selective Removal

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Electron Beam Resists and Pattern Transfer Methods

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies ◽

10.1007/978-94-015-8261-2_2 ◽

1994 ◽

pp. 13-23

Author(s):

Michael Hatzakis

Keyword(s):

Electron Beam ◽

Pattern Transfer

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Fabrication, investigation and manipulation of artificial nanostructures

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies ◽

10.1007/978-94-015-8261-2_9 ◽

1994 ◽

pp. 81-85

Author(s):

A. Menschig ◽

F. E. Prins ◽

G. Lehr ◽

R. Bergmann ◽

J. Hommel ◽

...

Keyword(s):

Artificial Nanostructures

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Low Voltage e-Beam Lithography with the Scanning Tunneling Microscope

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies ◽

10.1007/978-94-015-8261-2_18 ◽

1994 ◽

pp. 175-188 ◽

Cited By ~ 2

Author(s):

C. R. K. Marrian ◽

F. K. Perkins ◽

S. L. Brandow ◽

T. S. Koloski ◽

E. A. Dobisz ◽

...

Keyword(s):

Scanning Tunneling Microscope ◽

Low Voltage ◽

Scanning Tunneling ◽

Tunneling Microscope

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Nanolithography Requirements — An Equipment Manufacturers View

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies ◽

10.1007/978-94-015-8261-2_11 ◽

1994 ◽

pp. 95-101

Author(s):

B. A. Wallman ◽

P. G. Crawley

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NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray LithographiesLatest Publications

TOTAL DOCUMENTS

H-INDEX

Published By Springer Netherlands

Sub-10nm Electron Beam Lithography: -AIF3-Doped Lithium Fluoride as a Resist

Intense Focused Ion Beams for Nanostructurisation

X-ray Phase Shifting Masks

Nano-Lithography in 3 Dimensions with Electron Beam Induced Deposition

Nanolithography, The Integrated System

Patterning of InGaAs/GaAs Quantum Dots Using E-Beam Lithography and Selective Removal of the Top Barrier

Electron Beam Resists and Pattern Transfer Methods

Fabrication, investigation and manipulation of artificial nanostructures

Low Voltage e-Beam Lithography with the Scanning Tunneling Microscope

Nanolithography Requirements — An Equipment Manufacturers View

NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies
Latest Publications