A high-stability scanning tunneling microscope achieved by an isolated tiny scanner with low voltage imaging capability

2013 ◽  
Vol 84 (11) ◽  
pp. 113703 ◽  
Keyword(s):  
Scanning Tunneling Microscope ◽  
High Stability ◽  
Low Voltage ◽  
Scanning Tunneling ◽  
Tunneling Microscope ◽  
Voltage Imaging ◽  
Imaging Capability

Low voltage electron beam lithography in self‐assembled ultrathin films with the scanning tunneling microscope

1994 ◽  
Vol 64 (3) ◽  
pp. 390-392 ◽  
Author(s):  
C. R. K. Marrian ◽  
F. K. Perkins ◽  
S. L. Brandow ◽  
T. S. Koloski ◽  
E. A. Dobisz ◽  
...  
Keyword(s):  
Electron Beam ◽  
Ultrathin Films ◽  
Electron Beam Lithography ◽  
Scanning Tunneling Microscope ◽  
Low Voltage ◽  
Scanning Tunneling ◽  
Tunneling Microscope ◽  
Voltage Electron ◽  
Self Assembled

High‐stability scanning tunneling microscope

1985 ◽  
Vol 56 (8) ◽  
pp. 1573-1576 ◽  
Author(s):  
G. F. A. van de Walle ◽  
J. W. Gerritsen ◽  
H. van Kempen ◽  
P. Wyder
Keyword(s):  
Scanning Tunneling Microscope ◽  
High Stability ◽  
Scanning Tunneling ◽  
Tunneling Microscope

A high stability and repeatability electrochemical scanning tunneling microscope

2014 ◽  
Vol 85 (12) ◽  
pp. 125103 ◽  
Author(s):  
Zhigang Xia ◽  
Jihao Wang ◽  
Yubin Hou ◽  
Qingyou Lu
Keyword(s):  
Scanning Tunneling Microscope ◽  
High Stability ◽  
Scanning Tunneling ◽  
Tunneling Microscope

Compact, high‐stability, ‘‘thimble‐size’’ scanning tunneling microscope

1988 ◽  
Vol 59 (7) ◽  
pp. 1035-1038 ◽  
Author(s):  
F. Besenbacher ◽  
E. Laegsgaard ◽  
K. Mortensen ◽  
U. Nielsen ◽  
I. Stensgaard
Keyword(s):  
Scanning Tunneling Microscope ◽  
High Stability ◽  
Scanning Tunneling ◽  
Tunneling Microscope

High‐stability bimorph scanning tunneling microscope

1987 ◽  
Vol 58 (8) ◽  
pp. 1343-1348 ◽  
Author(s):  
B. L. Blackford ◽  
D. C. Dahn ◽  
M. H. Jericho
Keyword(s):  
Scanning Tunneling Microscope ◽  
High Stability ◽  
Scanning Tunneling ◽  
Tunneling Microscope

Low Voltage e-Beam Lithography with the Scanning Tunneling Microscope

1994 ◽  
pp. 175-188 ◽  
Author(s):  
C. R. K. Marrian ◽  
F. K. Perkins ◽  
S. L. Brandow ◽  
T. S. Koloski ◽  
E. A. Dobisz ◽  
...  
Keyword(s):  
Scanning Tunneling Microscope ◽  
Low Voltage ◽  
Scanning Tunneling ◽  
Tunneling Microscope

GaAs and Si Assisted Etching using a Scanning Tunneling Microscope

1991 ◽  
Vol 236 ◽  
Author(s):  
Masakazu Baba ◽  
Shinji Matsui
Keyword(s):  
Scanning Tunneling Microscope ◽  
Gas Flow ◽  
Low Voltage ◽  
Atomic Layer ◽  
Flow Time ◽  
Scanning Tunneling ◽  
Tunneling Microscope ◽  
Etching Profile ◽  
Atomic Layer Etching

AbstractGaAs etching with Cl2 gas is studied with a scanning tunneling microscope (STM). Both Cl2 gas and tunnel electron assist etching occur under the tip during scanning and the etching profile is found to depend on the gas flow time. GaAs and Si patterns with nanometer dimensions are fabricated by STM assist etching with a very low voltage (-IV). Also atomic layer etching of GaAs is demonstrated by STM assist-etching using a Cl adlayer.

Sign in / Sign up

Export Citation Format

Share Document