Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

S. V. Singh

doi:10.1063/1.2905213

Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

Journal of Applied Physics ◽

10.1063/1.2905213 ◽

2008 ◽

Vol 103 (8) ◽

pp. 083303 ◽

Cited By ~ 21

Author(s):

S. V. Singh

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Mode Transition ◽

Electron Energy Distribution ◽

Inductively Coupled ◽

Argon Discharge

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Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

Physics of Plasmas ◽

10.1063/1.5031221 ◽

2018 ◽

Vol 25 (6) ◽

pp. 063501 ◽

Cited By ~ 15

Author(s):

S. Sharma ◽

N. Sirse ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Excitation Frequency ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Argon Discharge

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Measurements of the electron energy distribution function in molecular gases in a shielded inductively coupled plasma

Journal of Applied Physics ◽

10.1063/1.1290450 ◽

2000 ◽

Vol 88 (7) ◽

pp. 3889 ◽

Cited By ~ 52

Author(s):

Harmeet Singh ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Molecular Gases ◽

Inductively Coupled

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Modeling argon inductively coupled plasmas: The electron energy distribution function and metastable kinetics

Journal of Applied Physics ◽

10.1063/1.1452772 ◽

2002 ◽

Vol 91 (6) ◽

pp. 3539-3546 ◽

Cited By ~ 55

Author(s):

Mark W. Kiehlbauch ◽

David B. Graves

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled Plasmas ◽

Inductively Coupled ◽

Coupled Plasmas

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Electron energy distribution function and plasma potential in a planar inductive argon discharge without electrostatic screen

Applied Physics Letters ◽

10.1063/1.124010 ◽

1999 ◽

Vol 74 (19) ◽

pp. 2776-2778 ◽

Cited By ~ 42

Author(s):

Sang-Hun Seo ◽

Jung-In Hong ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Plasma Potential ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Argon Discharge

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Electron energy distribution function close to the mode transition region in an inductively coupled gaseous electronics conference reference cell

Applied Physics Letters ◽

10.1063/1.2362599 ◽

2006 ◽

Vol 89 (16) ◽

pp. 161501 ◽

Cited By ~ 24

Author(s):

S. V. Singh ◽

P. Kempkes ◽

H. Soltwisch

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Transition Region ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Mode Transition ◽

Reference Cell ◽

Inductively Coupled ◽

Gaseous Electronics Conference

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Effect of electron energy distribution function on power deposition and plasma density in an inductively coupled discharge at very low pressures

Plasma Sources Science and Technology ◽

10.1088/0963-0252/12/3/302 ◽

2003 ◽

Vol 12 (3) ◽

pp. 302-312 ◽

Cited By ~ 21

Author(s):

Badri Ramamurthi ◽

Demetre J Economou ◽

Igor D Kaganovich

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Plasma Density ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Power Deposition ◽

Inductively Coupled ◽

Low Pressures

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Tuning effect of inert gas mixing on electron energy distribution function in inductively coupled discharges

Plasma Physics and Controlled Fusion ◽

10.1088/0741-3335/48/1/006 ◽

2005 ◽

Vol 48 (1) ◽

pp. 61-70 ◽

Cited By ~ 15

Author(s):

Yi-Kang Pu ◽

Zhi-Gang Guo ◽

Aman-ur-Rehman ◽

Zhen-Dong Yu ◽

Jie Ma

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Inert Gas ◽

Electron Energy Distribution ◽

Gas Mixing ◽

Inductively Coupled

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Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Journal of Applied Physics ◽

10.1063/1.1990264 ◽

2005 ◽

Vol 98 (4) ◽

pp. 043301 ◽

Cited By ~ 5

Author(s):

Sang-Hun Seo ◽

Jung-Hwan In ◽

Hong-Young Chang ◽

Jeon-Geon Han

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Time Evolution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Unbalanced Magnetron ◽

Argon Discharge

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The nonlocal and local property of the electron energy distribution function in a low-pressure inductively coupled plasma

Physics of Plasmas ◽

10.1063/1.1287826 ◽

2000 ◽

Vol 7 (9) ◽

pp. 3826-3828 ◽

Cited By ~ 13

Author(s):

ChinWook Chung ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Local Property ◽

Low Pressure ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled

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Measurement of the electron energy distribution function in CO2 inductively coupled plasma

Physics of Plasmas ◽

10.1063/1.5125423 ◽

2019 ◽

Vol 26 (12) ◽

pp. 123516

Author(s):

Kyung-Hyun Kim ◽

Kwan-Yong Kim ◽

Young-Hun Hong ◽

Ho-Jun Moon ◽

Chin-Wook Chung

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Inductively Coupled Plasma ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Inductively Coupled

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