Electron energy distribution function and plasma potential in a planar inductive argon discharge without electrostatic screen

1999 ◽  
Vol 74 (19) ◽  
pp. 2776-2778 ◽  
Author(s):  
Sang-Hun Seo ◽  
Jung-In Hong ◽  
Hong-Young Chang
2003 ◽  
Vol 42 (Part 1, No. 2A) ◽  
pp. 657-662 ◽  
Author(s):  
Kazuya Uehara ◽  
Akira Tsushima ◽  
Hiroshi Amemiya ◽  
Hisato Kawasima ◽  
Katsumichi Hoshino

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