Electron energy distribution function and plasma potential in a planar inductive argon discharge without electrostatic screen
2016 ◽
Vol 25
(3)
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pp. 033001
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1977 ◽
Vol 27
(9)
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pp. 1027-1033
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1985 ◽
Vol 18
(3)
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pp. 347-358
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2003 ◽
Vol 42
(Part 1, No. 2A)
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pp. 657-662
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