The nonlocal and local property of the electron energy distribution function in a low-pressure inductively coupled plasma

2000 ◽  
Vol 7 (9) ◽  
pp. 3826-3828 ◽  
Author(s):  
ChinWook Chung ◽  
Hong-Young Chang
Keyword(s):  
Distribution Function ◽  
Energy Distribution ◽  
Electron Energy ◽  
Inductively Coupled Plasma ◽  
Electron Energy Distribution Function ◽  
Local Property ◽  
Low Pressure ◽  
Energy Distribution Function ◽  
Electron Energy Distribution ◽  
Inductively Coupled
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