Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Sang-Hun Seo; Jung-Hwan In; Hong-Young Chang; Jeon-Geon Han

doi:10.1063/1.1990264

Time evolution of electron energy distribution function and plasma parameters in pulsed and unbalanced magnetron argon discharge

Journal of Applied Physics ◽

10.1063/1.1990264 ◽

2005 ◽

Vol 98 (4) ◽

pp. 043301 ◽

Cited By ~ 5

Author(s):

Sang-Hun Seo ◽

Jung-Hwan In ◽

Hong-Young Chang ◽

Jeon-Geon Han

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Time Evolution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Unbalanced Magnetron ◽

Argon Discharge

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Influence of excitation frequency on the metastable atoms and electron energy distribution function in a capacitively coupled argon discharge

Physics of Plasmas ◽

10.1063/1.5031221 ◽

2018 ◽

Vol 25 (6) ◽

pp. 063501 ◽

Cited By ~ 15

Author(s):

S. Sharma ◽

N. Sirse ◽

M. M. Turner ◽

A. R. Ellingboe

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Excitation Frequency ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Capacitively Coupled ◽

Argon Discharge

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Electron energy distribution function and plasma parameters across magnetic filters

Applied Physics Letters ◽

10.1063/1.3680088 ◽

2012 ◽

Vol 100 (4) ◽

pp. 044102 ◽

Cited By ~ 56

Author(s):

A. Aanesland ◽

J. Bredin ◽

P. Chabert ◽

V. Godyak

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters

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Electron energy distribution function and plasma potential in a planar inductive argon discharge without electrostatic screen

Applied Physics Letters ◽

10.1063/1.124010 ◽

1999 ◽

Vol 74 (19) ◽

pp. 2776-2778 ◽

Cited By ~ 42

Author(s):

Sang-Hun Seo ◽

Jung-In Hong ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Plasma Potential ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Argon Discharge

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Evolution of the electron energy distribution function in a planar inductive argon discharge

Applied Physics Letters ◽

10.1063/1.125685 ◽

2000 ◽

Vol 76 (2) ◽

pp. 149-151 ◽

Cited By ~ 18

Author(s):

Sang-Hun Seo ◽

S. S. Kim ◽

Jung-In Hong ◽

C. S. Chang ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Argon Discharge

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Hysteresis and mode transition in terms of electron energy distribution function for an inductively coupled argon discharge

Journal of Applied Physics ◽

10.1063/1.2905213 ◽

2008 ◽

Vol 103 (8) ◽

pp. 083303 ◽

Cited By ~ 21

Author(s):

S. V. Singh

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Mode Transition ◽

Electron Energy Distribution ◽

Inductively Coupled ◽

Argon Discharge

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Temporal evolution of electron energy distribution function and plasma parameters in the afterglow of drifting magnetron plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/14/3/021 ◽

2005 ◽

Vol 14 (3) ◽

pp. 576-580 ◽

Cited By ~ 9

Author(s):

Sang-Hun Seo ◽

Jung-Hwan In ◽

Hong-Young Chang

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Temporal Evolution ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters

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Electron energy distribution function measurements and plasma parameters in inductively coupled argon plasma

Plasma Sources Science and Technology ◽

10.1088/0963-0252/11/4/320 ◽

2002 ◽

Vol 11 (4) ◽

pp. 525-543 ◽

Cited By ~ 236

Author(s):

V A Godyak ◽

R B Piejak ◽

B M Alexandrovich

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Argon Plasma ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Plasma Parameters ◽

Inductively Coupled

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A novel algorithm for calculating the time evolution of the electron energy distribution function in gaseous discharges

Journal of Applied Physics ◽

10.1063/1.340340 ◽

1988 ◽

Vol 63 (11) ◽

pp. 5601-5603 ◽

Cited By ~ 21

Author(s):

P. J. Drallos ◽

J. M. Wadehra

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Time Evolution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Novel Algorithm

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Time evolution of the electron energy distribution function in pulsed microwave magnetoplasma in H2

Physics of Plasmas ◽

10.1063/1.4944677 ◽

2016 ◽

Vol 23 (3) ◽

pp. 033513 ◽

Cited By ~ 6

Author(s):

J. L. Jauberteau ◽

I. Jauberteau ◽

O. D. Cortázar ◽

A. Megía-Macías

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Time Evolution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution

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Apparatus for the electron energy distribution function measurement in the afterglow discharge

Czechoslovak Journal of Physics ◽

10.1007/bf01589560 ◽

1977 ◽

Vol 27 (9) ◽

pp. 1027-1033 ◽

Cited By ~ 1

Author(s):

M. Tichý

Keyword(s):

Distribution Function ◽

Energy Distribution ◽

Electron Energy ◽

Electron Energy Distribution Function ◽

Energy Distribution Function ◽

Electron Energy Distribution ◽

Function Measurement

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