Enhancement of collimated low-energy broad-beam ion source with four-grid accelerator system

E. K. Wåhlin; M. Watanabe; J. Shimonek; D. Burtner; D. Siegfried

doi:10.1063/1.1631745

Enhancement of collimated low-energy broad-beam ion source with four-grid accelerator system

Applied Physics Letters ◽

10.1063/1.1631745 ◽

2003 ◽

Vol 83 (23) ◽

pp. 4722-4724 ◽

Cited By ~ 4

Author(s):

E. K. Wåhlin ◽

M. Watanabe ◽

J. Shimonek ◽

D. Burtner ◽

D. Siegfried

Keyword(s):

Ion Source ◽

Low Energy ◽

Broad Beam ◽

Accelerator System

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A modified broad beam ion source for low-energy hydrogen implantation

Review of Scientific Instruments ◽

10.1063/1.1148786 ◽

1998 ◽

Vol 69 (3) ◽

pp. 1499-1504 ◽

Cited By ~ 6

Author(s):

K. Otte ◽

A. Schindler ◽

F. Bigl ◽

H. Schlemm

Keyword(s):

Ion Source ◽

Low Energy ◽

Broad Beam ◽

Hydrogen Implantation

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Low energy broad beam multipole ion source

Review of Scientific Instruments ◽

10.1063/1.1144964 ◽

1994 ◽

Vol 65 (4) ◽

pp. 1371-1373

Author(s):

D. L. Lu ◽

J. F. Yang ◽

S. F. Jiang

Keyword(s):

Ion Source ◽

Low Energy ◽

Broad Beam

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Reactive etching of semiconductor surfaces using an electronically chopped low energy broad beam ion source

Surface and Coatings Technology ◽

10.1016/s0257-8972(03)00599-1 ◽

2003 ◽

Vol 174-175 ◽

pp. 157-161 ◽

Cited By ~ 2

Author(s):

J. Dienelt ◽

K. Zimmer ◽

H. Neumann

Keyword(s):

Ion Source ◽

Low Energy ◽

Semiconductor Surfaces ◽

Broad Beam

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Ion implantation boriding of iron and AISI M2 steel using a high-current density, low energy, broad-beam ion source

Surface and Coatings Technology ◽

10.1016/s0257-8972(98)00374-0 ◽

1998 ◽

Vol 103-104 ◽

pp. 52-57 ◽

Cited By ~ 23

Author(s):

J.A. Davis ◽

P.J. Wilbur ◽

D.L. Williamson ◽

R. Wei ◽

J.J. Vajo

Keyword(s):

Ion Implantation ◽

Current Density ◽

High Current Density ◽

Ion Source ◽

Low Energy ◽

High Current ◽

Broad Beam

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Broad beam low-energy ion source for ion-beam assisted deposition and material processing

Review of Scientific Instruments ◽

10.1063/1.1702109 ◽

2004 ◽

Vol 75 (5) ◽

pp. 1934-1936 ◽

Cited By ~ 7

Author(s):

D. A. Kotov

Keyword(s):

Material Processing ◽

Ion Beam ◽

Ion Source ◽

Low Energy ◽

Broad Beam ◽

Ion Beam Assisted Deposition

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Broad beam gas ion source with hollow cathode discharge and four-grid accelerator system

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms ◽

10.1016/j.nimb.2007.01.258 ◽

2007 ◽

Vol 257 (1-2) ◽

pp. 801-804 ◽

Cited By ~ 2

Author(s):

Deli Tang ◽

Shihao Pu ◽

Qi Huang ◽

Honghui Tong ◽

Xirong Cui ◽

...

Keyword(s):

Hollow Cathode ◽

Ion Source ◽

Hollow Cathode Discharge ◽

Broad Beam ◽

Accelerator System

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Characterization and optimization of low-energy broad-beam ion source

Emerging Materials Research ◽

10.1680/jemmr.19.00054 ◽

2019 ◽

Vol 8 (3) ◽

pp. 354-359 ◽

Cited By ~ 2

Author(s):

Ali Atta ◽

Hassan Mohamed Abdel-Hamid ◽

Yasser Hassan Ali Fawzy ◽

Mohamed Mahmoud El-Okr

Keyword(s):

Ion Source ◽

Low Energy ◽

Broad Beam

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Correlating low energy neutron SER with broad beam neutron and 200 MeV proton SER for 22nm CMOS Tri-Gate devices

2013 IEEE International Reliability Physics Symposium (IRPS) ◽

10.1109/irps.2013.6531989 ◽

2013 ◽

Cited By ~ 5

Author(s):

S. Jahinuzzaman ◽

B. Gill ◽

V. Ambrose ◽

N. Seifert

Keyword(s):

Low Energy ◽

Broad Beam ◽

Energy Neutron

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Development of ion injection into the BNL test electron beam ion source using a prototype low energy beam transfer switchyard and a hollow cathode ion source (abstract)

Review of Scientific Instruments ◽

10.1063/1.2821595 ◽

2008 ◽

Vol 79 (2) ◽

pp. 02B318

Author(s):

E. N. Beebe ◽

J. G. Alessi ◽

A. Kponou ◽

C. Meitzler ◽

A. Pikin ◽

...

Keyword(s):

Electron Beam ◽

Hollow Cathode ◽

Ion Source ◽

Low Energy ◽

Energy Beam ◽

Ion Injection ◽

Test Electron

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Low-energy, high-current, ion source with cold electron emitter

Review of Scientific Instruments ◽

10.1063/1.3653870 ◽

2012 ◽

Vol 83 (2) ◽

pp. 02B301

Author(s):

A. V. Vizir ◽

M. V. Shandrikov ◽

G. Yu. Yushkov ◽

E. M. Oks

Keyword(s):

Ion Source ◽

Low Energy ◽

Cold Electron ◽

High Current ◽

Electron Emitter

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