Low energy broad beam multipole ion source

1994 ◽  
Vol 65 (4) ◽  
pp. 1371-1373
Author(s):  
D. L. Lu ◽  
J. F. Yang ◽  
S. F. Jiang
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
Broad Beam

A modified broad beam ion source for low-energy hydrogen implantation

1998 ◽  
Vol 69 (3) ◽  
pp. 1499-1504 ◽  
Author(s):  
K. Otte ◽  
A. Schindler ◽  
F. Bigl ◽  
H. Schlemm
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
Broad Beam ◽  
Hydrogen Implantation

Enhancement of collimated low-energy broad-beam ion source with four-grid accelerator system

2003 ◽  
Vol 83 (23) ◽  
pp. 4722-4724 ◽  
Author(s):  
E. K. Wåhlin ◽  
M. Watanabe ◽  
J. Shimonek ◽  
D. Burtner ◽  
D. Siegfried
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
Broad Beam ◽  
Accelerator System

Characterization and optimization of low-energy broad-beam ion source

2019 ◽  
Vol 8 (3) ◽  
pp. 354-359 ◽  
Author(s):  
Ali Atta ◽  
Hassan Mohamed Abdel-Hamid ◽  
Yasser Hassan Ali Fawzy ◽  
Mohamed Mahmoud El-Okr
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
Broad Beam

Low-energy, high-current, ion source with cold electron emitter

2012 ◽  
Vol 83 (2) ◽  
pp. 02B301
Author(s):  
A. V. Vizir ◽  
M. V. Shandrikov ◽  
G. Yu. Yushkov ◽  
E. M. Oks
Keyword(s):  
Ion Source ◽  
Low Energy ◽  
Cold Electron ◽  
High Current ◽  
Electron Emitter

A new broad-beam alkali ion source for use in ultra high vacuum

1996 ◽  
Vol 7 (6) ◽  
pp. 944-948 ◽  
Author(s):  
Ilija Terzic ◽  
Momcilo M Tosic ◽  
Jovan Elazar
Keyword(s):  
High Vacuum ◽  
Ion Source ◽  
Ultra High Vacuum ◽  
Broad Beam ◽  
Alkali Ion
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