Electrical characterization of InGaAs/InP quantum wells by scanning capacitance microscopy

2003 ◽  
Vol 83 (20) ◽  
pp. 4205-4207 ◽  
Author(s):  
K. Maknys ◽  
O. Douhéret ◽  
S. Anand
Author(s):  
Yuk L. Tsang ◽  
Alex VanVianen ◽  
Xiang D. Wang ◽  
N. David Theodore

Abstract In this paper, we report a device model that has successfully described the characteristics of an anomalous CMOS NFET and led to the identification of a non-visual defect. The model was based on detailed electrical characterization of a transistor exhibiting a threshold voltage (Vt) of about 120mv lower than normal and also exhibiting source to drain leakage. Using a simple graphical simulation, we predicted that the anomalous device was a transistor in parallel with a resistor. It was proposed that the resistor was due to a counter doping defect. This was confirmed using Scanning Capacitance Microscopy (SCM). The dopant defect was shown by TEM imaging to be caused by a crystalline silicon dislocation.


1993 ◽  
Vol 326 ◽  
Author(s):  
F. Yu ◽  
R. Droopad ◽  
G.N. Maracas ◽  
J. Liu ◽  
R. Rajesh ◽  
...  

2013 ◽  
Vol 102 (25) ◽  
pp. 252103 ◽  
Author(s):  
Geoffrey C. Gardner ◽  
John D. Watson ◽  
Sumit Mondal ◽  
Nianpei Deng ◽  
Gabor A. Csáthy ◽  
...  

Author(s):  
Lim Soon Huat ◽  
Lwin Hnin-Ei ◽  
Vinod Narang ◽  
J.M. Chin

Abstract Scanning capacitance microscopy (SCM) has been used in electrical failure analysis (EFA) to isolate failing silicon transistors on silicon-on-insulator (SOI) substrates. With the shrinking device geometry and increasing layout complexity, the defects in transistors are often non-visual and require detailed electrical analysis to pinpoint the defect signature. This paper demonstrates the use of SCM technique for EFA on SOI device substrates, as well as using this technique to isolate defective contacts in a relatively large-area scan of 25µm x 25µm. We also performed dC/dV electrical characterization of defective transistors, and correlated the data from SCM technique and electrical data from nano-probing to locate failing transistors.


2002 ◽  
Author(s):  
Agisilaos A. Iliadis ◽  
Soumya Krishnamoorthy ◽  
Wei Yang ◽  
Supab Choopun ◽  
R. D. Vispute ◽  
...  

2006 ◽  
Vol 45 (6B) ◽  
pp. 5478-5480 ◽  
Author(s):  
Eun Kyu Kim ◽  
Ji Sun Park ◽  
Jin Soak Kim ◽  
Il Ki Han ◽  
Jin Dong Song

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