Low-temperature atomic force microscope using piezoresistive cantilevers

1999 ◽  
Vol 70 (8) ◽  
pp. 3369-3372 ◽  
Author(s):  
R. E. Thomson
2011 ◽  
Vol 82 (2) ◽  
pp. 023705 ◽  
Author(s):  
U. Gysin ◽  
S. Rast ◽  
M. Kisiel ◽  
C. Werle ◽  
E. Meyer

2019 ◽  
Vol 86 (s1) ◽  
pp. 12-16
Author(s):  
Janik Schaude ◽  
Julius Albrecht ◽  
Ute Klöpzig ◽  
Andreas C. Gröschl ◽  
Tino Hausotte

AbstractThis article presents a new tilting atomic force microscope (AFM) with an adjustable probe direction and piezoresistive cantilever operated in tapping-mode. The AFM is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The whole setup is integrated into a nano measuring machine (NMM-1) and the metrological traceability of the piezoresistive cantilever is warranted by in situ calibration on the NMM-1. To demonstrate the capabilities of the tilting AFM, measurements were conducted on a step height standard.


2001 ◽  
Vol 72 (7) ◽  
pp. 2971-2976 ◽  
Author(s):  
N. Suehira ◽  
Y. Tomiyoshi ◽  
Y. Sugawara ◽  
S. Morita

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