scholarly journals Mechanisms for polycrystalline silicon defect passivation by hydrogenation in an electron cyclotron resonance plasma

1995 ◽  
Vol 67 (21) ◽  
pp. 3099-3101 ◽  
Author(s):  
E. S. Cielaszyk ◽  
K. H. R. Kirmse ◽  
R. A. Stewart ◽  
A. E. Wendt
Keyword(s):  
Cyclotron Resonance ◽  
Polycrystalline Silicon ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Defect Passivation ◽  
Resonance Plasma

Electron cyclotron resonance plasma etching of InP in CH4/H2/Ar

1990 ◽  
Vol 56 (15) ◽  
pp. 1424-1426 ◽  
Author(s):  
S. J. Pearton ◽  
U. K. Chakrabarti ◽  
A. P. Kinsella ◽  
D. Johnson ◽  
C. Constantine
Keyword(s):  
Plasma Etching ◽  
Cyclotron Resonance ◽  
Electron Cyclotron Resonance ◽  
Electron Cyclotron ◽  
Electron Cyclotron Resonance Plasma ◽  
Resonance Plasma
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