Fast two‐dimensional self‐consistent kinetic modeling of low‐pressure inductively coupled RF discharges

U. Kortshagen; L. D. Tsendin

doi:10.1063/1.112050

Fast two‐dimensional self‐consistent kinetic modeling of low‐pressure inductively coupled RF discharges

Applied Physics Letters ◽

10.1063/1.112050 ◽

1994 ◽

Vol 65 (11) ◽

pp. 1355-1357 ◽

Cited By ~ 44

Author(s):

U. Kortshagen ◽

L. D. Tsendin

Keyword(s):

Kinetic Modeling ◽

Low Pressure ◽

Two Dimensional ◽

Inductively Coupled ◽

Rf Discharges ◽

Self Consistent

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Experimental investigation and fast two-dimensional self-consistent kinetic modeling of a low-pressure inductively coupled rf discharge

Physical Review E ◽

10.1103/physreve.51.6063 ◽

1995 ◽

Vol 51 (6) ◽

pp. 6063-6078 ◽

Cited By ~ 90

Author(s):

U. Kortshagen ◽

I. Pukropski ◽

L. D. Tsendin

Keyword(s):

Experimental Investigation ◽

Kinetic Modeling ◽

Low Pressure ◽

Rf Discharge ◽

Two Dimensional ◽

Inductively Coupled ◽

Self Consistent

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Self-Consistent Kinetic Modeling of Electron Distribution Function in a Low-Pressure Inductively Coupled Plasma

Chinese Physics Letters ◽

10.1088/0256-307x/13/6/013 ◽

1996 ◽

Vol 13 (6) ◽

pp. 447-450

Author(s):

Yun Yang ◽

Han-ming Wu

Keyword(s):

Distribution Function ◽

Kinetic Modeling ◽

Inductively Coupled Plasma ◽

Electron Distribution ◽

Electron Distribution Function ◽

Low Pressure ◽

Inductively Coupled ◽

Self Consistent

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Self‐consistent kinetic modeling of low‐pressure inductively coupled radio‐frequency discharges

Journal of Applied Physics ◽

10.1063/1.363319 ◽

1996 ◽

Vol 80 (7) ◽

pp. 3699-3704 ◽

Cited By ~ 15

Author(s):

Yun Yang ◽

Hanming Wu

Keyword(s):

Radio Frequency ◽

Kinetic Modeling ◽

Low Pressure ◽

Inductively Coupled ◽

Self Consistent ◽

Radio Frequency Discharges

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Investigation of the radial uniformity of planar inductively coupled RF discharges using a self-consistent two-dimensional kinetic model

International Conference on Plasma Science (papers in summary form only received) ◽

10.1109/plasma.1995.531541 ◽

1995 ◽

Author(s):

U. Kortshagen

Keyword(s):

Kinetic Model ◽

Two Dimensional ◽

Inductively Coupled ◽

Rf Discharges ◽

Self Consistent

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Rapid two‐dimensional self‐consistent simulation of inductively coupled plasma and comparison with experimental data

Applied Physics Letters ◽

10.1063/1.115834 ◽

1996 ◽

Vol 68 (18) ◽

pp. 2499-2501 ◽

Cited By ~ 38

Author(s):

Richard S. Wise ◽

Dimitris P. Lymberopoulos ◽

Demetre J. Economou

Keyword(s):

Experimental Data ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Inductively Coupled ◽

Self Consistent ◽

Comparison With Experimental Data

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Kinetic modeling of the charging of nonconducting walls in a low pressure radio frequency inductively coupled plasma

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.580986 ◽

1998 ◽

Vol 16 (1) ◽

pp. 300-305 ◽

Cited By ~ 9

Author(s):

U. Kortshagen

Keyword(s):

Radio Frequency ◽

Kinetic Modeling ◽

Inductively Coupled Plasma ◽

Low Pressure ◽

Inductively Coupled

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Two-dimensional simulation of ion energy and angular distributions at the wafer in low-pressure RF discharges

ICOPS 2000. IEEE Conference Record - Abstracts. 27th IEEE International Conference on Plasma Science (Cat. No.00CH37087) ◽

10.1109/plasma.2000.854722 ◽

2002 ◽

Author(s):

Y. Hu ◽

T.L. Lin ◽

C.Y. Huang

Keyword(s):

Low Pressure ◽

Angular Distributions ◽

Two Dimensional ◽

Ion Energy ◽

Rf Discharges ◽

Dimensional Simulation ◽

Energy And Angular Distributions

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Two-Dimensional Self-Consistent Kinetic Model for Solenoidal Inductively Coupled Plasma

Plasma Science and Technology ◽

10.1088/1009-0630/9/1/07 ◽

2007 ◽

Vol 9 (1) ◽

pp. 30-34 ◽

Cited By ~ 4

Author(s):

Mao Ming ◽

Dai Zhongling ◽

Wang Younian

Keyword(s):

Kinetic Model ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Inductively Coupled ◽

Self Consistent

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Formation Of Carbon Oxides In CH4/O2 Plasmas Produced By Inductively Coupled RF Discharges At Low Pressure

10.1063/1.1593864 ◽

2003 ◽

Author(s):

Ivonne Möller

Keyword(s):

Low Pressure ◽

Carbon Oxides ◽

Inductively Coupled ◽

Rf Discharges

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Self-consistent kinetic simulations of inductively coupled low-pressure discharges

The 31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts. ◽

10.1109/plasma.2004.1339842 ◽

2004 ◽

Author(s):

O.V. Polomarov ◽

C.E. Theodosiou ◽

I.D. Kaganovich

Keyword(s):

Low Pressure ◽

Inductively Coupled ◽

Self Consistent

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