Formation Of Carbon Oxides In CH4/O2 Plasmas Produced By Inductively Coupled RF Discharges At Low Pressure

2003 ◽  
Author(s):  
Ivonne Möller
Keyword(s):  
Low Pressure ◽  
Carbon Oxides ◽  
Inductively Coupled ◽  
Rf Discharges

Power Losses in RF Inductor of Ferrite-Free Closed-Loop Inductively-Coupled Low Pressure Mercury Lamps

2020 ◽  
pp. 89-94 ◽  
Author(s):  
Ekaterina V. Lovlya ◽  
Oleg A. Popov
Keyword(s):  
Closed Loop ◽  
Low Pressure ◽  
Mercury Vapour ◽  
Plasma Power ◽  
Power Losses ◽  
Inductive Discharge ◽  
Inductively Coupled ◽  
Radial Inhomogeneity ◽  
Transformer Model ◽  
Rf Inductor

RF inductor power losses of ferrite-free electrode-less low pressure mercury inductively-coupled discharges excited in closed-loop dielectric tube were studied. The modelling was made within the framework of low pressure inductive discharge transformer model for discharge lamps with tubes of 16, 25 and 38 mm inner diam. filled with the mixture of mercury vapour (7.5×10–3 mm Hg) and argon (0.1, 0.3 and 1.0 mm Hg) at RF frequencies of 1, 7; 3.4 and 5.1 MHz and plasma power of (25–500) W. Discharges were excited with the help of the induction coil of 3, 4 and 6 turns placed along the inner perimeter of the closed-loop tube. It was found that the dependence of coil power losses, Pcoil, on the discharge plasma power, Ppl, had the minimum while Pcoil decreased with RF frequency, tube diameter and coil number of turns. The modelling results were found in good qualitative agreement with the experimental data; quantitative discrepancies are believed to be due skin-effect and RF electric field radial inhomogeneity that were not included in discharge modelling.

The Characteristics of a Ferrite-free Closed-loop Inductively-coupled Low-pressure Mercury Discharge Lamp

Vestnik MEI ◽  
2018 ◽  
Vol 4 (4) ◽  
pp. 89-96 ◽  
Author(s):  
Oleg A. Popov ◽  
◽  
Pavel V. Starshinov ◽  
Viktoriya N. Vasina ◽  
◽  
...  
Keyword(s):  
Closed Loop ◽  
Low Pressure ◽  
Inductively Coupled ◽  
Discharge Lamp

Global model and diagnostic of a low-pressure SF6/Ar inductively coupled plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 025001 ◽  
Author(s):  
L Lallement ◽  
A Rhallabi ◽  
C Cardinaud ◽  
M C Peignon-Fernandez ◽  
L L Alves
Keyword(s):  
Inductively Coupled Plasma ◽  
Low Pressure ◽  
Global Model ◽  
Inductively Coupled
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