Rapid two‐dimensional self‐consistent simulation of inductively coupled plasma and comparison with experimental data

Richard S. Wise; Dimitris P. Lymberopoulos; Demetre J. Economou

doi:10.1063/1.115834

Rapid two‐dimensional self‐consistent simulation of inductively coupled plasma and comparison with experimental data

Applied Physics Letters ◽

10.1063/1.115834 ◽

1996 ◽

Vol 68 (18) ◽

pp. 2499-2501 ◽

Cited By ~ 38

Author(s):

Richard S. Wise ◽

Dimitris P. Lymberopoulos ◽

Demetre J. Economou

Keyword(s):

Experimental Data ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Inductively Coupled ◽

Self Consistent ◽

Comparison With Experimental Data

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Two-dimensional simulation of inductively coupled plasma based on COMSOL and comparison with experimental data

Journal of Semiconductors ◽

10.1088/1674-4926/34/6/066004 ◽

2013 ◽

Vol 34 (6) ◽

pp. 066004 ◽

Cited By ~ 8

Author(s):

Jia Cheng ◽

Linhong Ji ◽

Kesheng Wang ◽

Chuankun Han ◽

Yixiang Shi

Keyword(s):

Experimental Data ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Inductively Coupled ◽

Dimensional Simulation ◽

Comparison With Experimental Data

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Self-consistent global model for inductively coupled Cl2 plasma: Comparison with experimental data and application for the etch process analysis

Thin Solid Films ◽

10.1016/j.tsf.2007.01.027 ◽

2007 ◽

Vol 515 (13) ◽

pp. 5395-5402 ◽

Cited By ~ 7

Author(s):

A.M. Efremov ◽

Gwan-Ha Kim ◽

Jong-Gyu Kim ◽

Chang-Il Kim

Keyword(s):

Experimental Data ◽

Process Analysis ◽

Global Model ◽

Inductively Coupled ◽

Self Consistent ◽

Comparison With Experimental Data

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Two-Dimensional Self-Consistent Kinetic Model for Solenoidal Inductively Coupled Plasma

Plasma Science and Technology ◽

10.1088/1009-0630/9/1/07 ◽

2007 ◽

Vol 9 (1) ◽

pp. 30-34 ◽

Cited By ~ 4

Author(s):

Mao Ming ◽

Dai Zhongling ◽

Wang Younian

Keyword(s):

Kinetic Model ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Inductively Coupled ◽

Self Consistent

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Simulation of a large size inductively coupled plasma generator and comparison with experimental data

AIP Advances ◽

10.1063/1.5016354 ◽

2018 ◽

Vol 8 (1) ◽

pp. 015003 ◽

Cited By ~ 5

Keyword(s):

Experimental Data ◽

Inductively Coupled Plasma ◽

Plasma Generator ◽

Inductively Coupled ◽

Large Size ◽

Comparison With Experimental Data

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Two-dimensional nonlocal heating theory of planar-type inductively coupled plasma discharge

Physical Review E ◽

10.1103/physreve.55.7536 ◽

1997 ◽

Vol 55 (6) ◽

pp. 7536-7549 ◽

Cited By ~ 45

Author(s):

N. S. Yoon ◽

S. M. Hwang ◽

Duk-In Choi

Keyword(s):

Inductively Coupled Plasma ◽

Plasma Discharge ◽

Two Dimensional ◽

Inductively Coupled ◽

Nonlocal Heating

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Two-dimensional (weak anion exchange chromatography-gel electrophoresis) separations coupling to inductively coupled plasma mass spectrometry strategy for analysis of metalloproteins

Talanta ◽

10.1016/j.talanta.2018.03.037 ◽

2018 ◽

Vol 184 ◽

pp. 404-410 ◽

Cited By ~ 10

Author(s):

Xueting Yan ◽

Bin He ◽

Dingyi Wang ◽

Ligang Hu ◽

Lihong Liu ◽

...

Keyword(s):

Mass Spectrometry ◽

Anion Exchange ◽

Gel Electrophoresis ◽

Inductively Coupled Plasma ◽

Anion Exchange Chromatography ◽

Exchange Chromatography ◽

Two Dimensional ◽

Inductively Coupled ◽

Plasma Mass Spectrometry ◽

Weak Anion Exchange Chromatography

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Evolution of Two-Dimensional Plasma Density on the E–H Heating-Mode Transition in Planar-Type Inductively Coupled Plasma

IEEE Transactions on Plasma Science ◽

10.1109/tps.2011.2135382 ◽

2011 ◽

Vol 39 (11) ◽

pp. 2536-2537 ◽

Cited By ~ 8

Author(s):

Hyo-Chang Lee ◽

Young-Cheol Kim ◽

Chin-Wook Chung

Keyword(s):

Plasma Density ◽

Inductively Coupled Plasma ◽

Mode Transition ◽

Two Dimensional ◽

Inductively Coupled ◽

Heating Mode

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Identification of selenium species in selenium-enriched Lens esculenta plants by using two-dimensional liquid chromatography-inductively coupled plasma mass spectrometry and [77Se]selenomethionine selenium oxide spikes

Journal of Chromatography A ◽

10.1016/j.chroma.2006.11.031 ◽

2007 ◽

Vol 1139 (2) ◽

pp. 247-253 ◽

Cited By ~ 35

Author(s):

Zoyne Pedrero ◽

Jorge Ruiz Encinar ◽

Yolanda Madrid ◽

Carmen Cámara

Keyword(s):

Mass Spectrometry ◽

Liquid Chromatography ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Lens Esculenta ◽

Selenium Species ◽

Inductively Coupled ◽

Plasma Mass Spectrometry ◽

Selenium Oxide

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Two-dimensional density distribution of metastable atoms in an inductively coupled plasma in Ar

Physical Review E ◽

10.1103/physreve.58.7823 ◽

1998 ◽

Vol 58 (6) ◽

pp. 7823-7830 ◽

Cited By ~ 54

Author(s):

Masahiro Tadokoro ◽

Hajime Hirata ◽

Nobuhiko Nakano ◽

Zoran Lj. Petrović ◽

Toshiaki Makabe

Keyword(s):

Density Distribution ◽

Inductively Coupled Plasma ◽

Two Dimensional ◽

Inductively Coupled

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Evolution of two-dimensional plasma parameters in the plane of the wafer during the E- to H- and H- to E-mode transition in an inductively coupled plasma

Plasma Sources Science and Technology ◽

10.1088/1361-6595/aac241 ◽

2018 ◽

Vol 27 (5) ◽

pp. 055018 ◽

Cited By ~ 1

Author(s):

Il-Seo Park ◽

Kyung-Hyun Kim ◽

Tae-Woo Kim ◽

Kwan-Youg Kim ◽

Ho-Jun Moon ◽

...

Keyword(s):

Inductively Coupled Plasma ◽

Mode Transition ◽

Two Dimensional ◽

Plasma Parameters ◽

Inductively Coupled

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